Ion energy distributions in RF sheaths with dust particles

• Дата: 2009
• Автори: Kravchenko, O. Yu., Yastrub, Yu. A., Levada, G.I., Lisitchenko, T.Y.
• Формат: Стаття
• Мова: English
• Опубліковано: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2009
• Назва видання: Вопросы атомной науки и техники
• Теми: Динамика плазмы и взаимодействие плазма – стенка
• Онлайн доступ: http://dspace.nbuv.gov.ua/handle/123456789/88235
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Цитувати: Ion energy distributions in RF sheaths with dust particles / O. Yu. Kravchenko, Yu. A. Yastrub, G.I. Levada, T.Y. Lisitchenko // Вопросы атомной науки и техники. — 2009. — № 1. — С. 95-97. — Бібліогр.: 5 назв. — англ.

We study ion energy distributions functions (IEDFs) within an rf sheath with dust particles in SiH₄ radio-frequency discharges and compare results with ones in Ar rf discharges. The simulations are carried by PIC/MCC method over a wide range of pressure, dust density and dust radius. Our model includes electron-neutral collisions, various kinds of collisions of ions with neutrals, positive-negative ion collisions. Results of calculations show that IEDFs for positive ions SiH⁺³ in silane rf-discharge essentially differ from IEDFS for positive ions in Ar discharges. Ions near electrodes get greater energy in electronegative discharge in consequence of inessential charge exchange processes in the rfsheath. Peaks of high energy ions are appeared in IEDFs, which are caused by significant decreasing of the radiofrequency sheath width and the ratio of ion penetrating time through sheath to the radio-frequency discharge period. Results of calculations show that big dust particles slow down ions in rf-sheaths, but the presence small dust particles can increase energy of ions. It is explained by the increasing of the potential drop near electrode.