Axial energy spread measurements of a 27.12 MHz multicusp ion source
A 4.7 cm diameter and 8 cm long 27.12 MHz radio-frequency (RF) inductively coupled multicusp ion source has been designed for ion beam applications. Ion energy distribution functions (IED) of the extracted helium and argon ion beams were measured by use of a retarding field energy analyzer. Influe...
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| Date: | 2009 |
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| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2009
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/88321 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Axial energy spread measurements of a 27.12 MHz multicusp ion source / V.I. Voznyi, V.I. Miroshnichenko, S.N. Mordyk, V.E. Storizhko, D.P. Shulha // Вопросы атомной науки и техники. — 2009. — № 1. — С. 142-144. — Бібліогр.: 7 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| Summary: | A 4.7 cm diameter and 8 cm long 27.12 MHz radio-frequency (RF) inductively coupled multicusp ion source has
been designed for ion beam applications. Ion energy distribution functions (IED) of the extracted helium and argon ion
beams were measured by use of a retarding field energy analyzer. Influence of the RF power, gas pressure and the
extraction voltage on the ion energy spread of the beam is described. The ion energy spread is found to be 7 eV for
helium beam at 200 W RF power and gas pressure of 5 mTorr. |
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