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Simulating study of plasmachemical erosion of a-C:H films in a ECR discharge plasma

The dynamics of interference figure of the reflection spectrum for stainless steel and copper mirrors with specially deposited carbon-containing film (ɚ-C:H) were studied when the film was gradually eroded under impact of a deuterium plasma produced in conditions of electron cyclotron resonance (E...

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Bibliographic Details
Main Authors:	Konovalov, V.G., Makhov, M.N., Ryzhkov, I.V., Shapoval, A.N., Shtan’, A.F., Skorik, O.A., Solodovchenko, S.I., Timoshenko, A.I., Voitsenya, V.S.
Format:	Article
Language:	English
Published:	Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2011
Series:	Вопросы атомной науки и техники
Subjects:	Низкотемпературная плазма и плазменные технологии
Online Access:	http://dspace.nbuv.gov.ua/handle/123456789/90955
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Simulating study of plasmachemical erosion of a-C:H films in a ECR discharge plasma

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