Levitation of particles in O₂ plasma
Oxygen discharges are scientifically and industrially interesting owing to chemical properties and physical effects. These latter are mostly due to the presence of negative ions affecting the plasma boundary in front of the surface to be processed. In this contribution we use particles levitating...
Saved in:
| Date: | 2004 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Науковий фізико-технологічний центр МОН та НАН України
2004
|
| Series: | Физическая инженерия поверхности |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/98489 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Levitation of particles in O₂ plasma / B.M. Annaratone, T. Antonova, V.A. Lisovskiy, H.M. Thomas, G.E. Morfill // Физическая инженерия поверхности. — 2004. — Т. 2, № 4. — С. 165–167. — Бібліогр.: 4 назв. — англ. |
Institution
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Summary: | Oxygen discharges are scientifically and industrially interesting owing to chemical properties and
physical effects. These latter are mostly due to the presence of negative ions affecting the plasma
boundary in front of the surface to be processed. In this contribution we use particles levitating in the
Oxygen plasma sheath as a diagnostic of the intermediate positions in the sheath between the plasma
and the solid surface. The experimental results for three particle sizes are compared with the theoretical
levitation force obtained by the modelling of the electronegative plasma sheath and the charging of
particles in it. |
|---|