Levitation of particles in O₂ plasma
Oxygen discharges are scientifically and industrially interesting owing to chemical properties and physical effects. These latter are mostly due to the presence of negative ions affecting the plasma boundary in front of the surface to be processed. In this contribution we use particles levitating...
Збережено в:
| Дата: | 2004 |
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| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Науковий фізико-технологічний центр МОН та НАН України
2004
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| Назва видання: | Физическая инженерия поверхности |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/98489 |
| Теги: |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Levitation of particles in O₂ plasma / B.M. Annaratone, T. Antonova, V.A. Lisovskiy, H.M. Thomas, G.E. Morfill // Физическая инженерия поверхности. — 2004. — Т. 2, № 4. — С. 165–167. — Бібліогр.: 4 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Резюме: | Oxygen discharges are scientifically and industrially interesting owing to chemical properties and
physical effects. These latter are mostly due to the presence of negative ions affecting the plasma
boundary in front of the surface to be processed. In this contribution we use particles levitating in the
Oxygen plasma sheath as a diagnostic of the intermediate positions in the sheath between the plasma
and the solid surface. The experimental results for three particle sizes are compared with the theoretical
levitation force obtained by the modelling of the electronegative plasma sheath and the charging of
particles in it. |
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