One-beam dynamic ion mixing applied to coat elements onto sophistically shaped objects

• Дата: 2007
• Автори: Boyko, E.B., Komarov, F.F., Jukowski, P., Karwat, C., Kolasik, M., Kozak, C.
• Формат: Стаття
• Мова: English
• Опубліковано: Науковий фізико-технологічний центр МОН та НАН України 2007
• Назва видання: Физическая инженерия поверхности
• Онлайн доступ: http://dspace.nbuv.gov.ua/handle/123456789/98834
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Цитувати: One-beam dynamic ion mixing applied to coat elements onto sophistically shaped objects / E.B. Boyko, F.F. Komarov, P. Jukowski, C. Karwat, M. Kolasik, C. Kozak // Физическая инженерия поверхности. — 2007. — Т. 5, № 3-4. — С. 217–221. — Бібліогр.: 9 назв. — англ.

Recently suggested single-ion-beam setup for ion-beam assisted deposition (IBAD) of layers with various composition including the sputter target in a form of hollow truncated cone made of the material to be deposited allows the use of a single ion beam (e.g., noble gas) for simultaneous layer deposition and ion-beam mixing. Such a setup can also be applied for coating deposition on the surfaces having sophisticated geometric shape. In the present work single-beam IBAD was used for deposition of Ni and Mo coatings onto the surface of ball fingers. The Rutherford backscattering was used for evaluating the coating thickness distributions along the spherical surface of the aluminium ball fingers. It is shown that the results can be explained in terms of space distribution of the sputtered atoms inside the conical target.