Comparative study of positive and negative ion flows extracted from downstream plasmas beyond magnetic and electrostatic electron filters

• Дата: 2012
• Автори: Dudin, S., Rafalskyi, D., Popelier, L., Aanesland, A.
• Формат: Стаття
• Мова: English
• Опубліковано: Науковий фізико-технологічний центр МОН та НАН України 2012
• Назва видання: Физическая инженерия поверхности
• Онлайн доступ: http://dspace.nbuv.gov.ua/handle/123456789/98924
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Цитувати: Comparative study of positive and negative ion flows extracted from downstream plasmas beyond magnetic and electrostatic electron filters / S. Dudin, D. Rafalskyi, L. Popelier, A. Aanesland // Физическая инженерия поверхности. — 2012. — Т. 10, № 1. — С. 22–28. — Бібліогр.: 26 назв. — англ.

In the present paper we compare the positive and negative ion flows created using a recently developed electrostatic grid-type filter with the flows formed using a magnetic filter. Langmuir probe measurements show electron cooling with both filters, allowing effective formation of negative ions via electron dissociative attachment in the region of low electron temperature. The energy distribution functions of positive and negative ions extracted from the filtered plasmas are measured in both systems showing an almost monoenergetic nature of the ions with the energy corresponding to the imposed extraction potential. It is shown that in both cases strongly electronegative plasmas where the negative ion density is much larger than the electron density can be formed downstream of the filter. Biasing an internal electrode or the electrostatic filter grid allows control of the plasma potential. In the case of the electrostatic filter the plasma could be biased negatively compared to ground and effective extraction of negative ion was achieved.