Elemental and phase analysis of nanocomposite coatings on basis Ti-Hf-Si-N system received by the vacuum-arc deposition method

• Дата: 2012
• Автори: Grudnitskiy, V.V., Beresnev, V.M., Drobyshevskaya, А.А., Turbin, P.V., Toryanik, I.N., Grankin, S.S., Kolesnikov, D.А., Nemchenko, U.S.
• Формат: Стаття
• Мова: English
• Опубліковано: Науковий фізико-технологічний центр МОН та НАН України 2012
• Назва видання: Физическая инженерия поверхности
• Онлайн доступ: http://dspace.nbuv.gov.ua/handle/123456789/98973
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Цитувати: Elemental and phase analysis of nanocomposite coatings on basis Ti-Hf-Si-N system received by the vacuum-arc deposition method / V.V. Grudnitskiy, V.M. Beresnev, А.А. Drobyshevskaya, P.V. Turbin, I.N. Toryanik, S.S. Grankin, D.А. Kolesnikov, U.S. Nemchenko // Физическая инженерия поверхности. — 2012. — Т. 10, № 3. — С. 286–294. — Бібліогр.: 14 назв. — англ.

Coatings on the basis Ti-Hf-Si-N system were synthesized by vacuum-arc deposition method from the uniflow and separated ion-plasma flow. The morphology, elemental and phase composition of coatings were investigated. The dependence of the characteristics of the coating from the physical and technological parameters of deposition was installed. The two-phase structure of the coating: a substitutional solution (Ti, Hf)N and quasiamorphous silikonitrid α-Si₃N₄ was determined. The factors that determine the compressive stresses in the coatings were considered.