Elemental and phase analysis of nanocomposite coatings on basis Ti-Hf-Si-N system received by the vacuum-arc deposition method
Coatings on the basis Ti-Hf-Si-N system were synthesized by vacuum-arc deposition method from the uniflow and separated ion-plasma flow. The morphology, elemental and phase composition of coatings were investigated. The dependence of the characteristics of the coating from the physical and tec...
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Дата: | 2012 |
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Автори: | , , , , , , , |
Формат: | Стаття |
Мова: | English |
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Науковий фізико-технологічний центр МОН та НАН України
2012
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Назва видання: | Физическая инженерия поверхности |
Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/98973 |
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Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
Цитувати: | Elemental and phase analysis of nanocomposite coatings on basis Ti-Hf-Si-N system received by the vacuum-arc deposition method / V.V. Grudnitskiy, V.M. Beresnev, А.А. Drobyshevskaya, P.V. Turbin, I.N. Toryanik, S.S. Grankin, D.А. Kolesnikov, U.S. Nemchenko // Физическая инженерия поверхности. — 2012. — Т. 10, № 3. — С. 286–294. — Бібліогр.: 14 назв. — англ. |
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irk-123456789-989732016-04-20T03:02:41Z Elemental and phase analysis of nanocomposite coatings on basis Ti-Hf-Si-N system received by the vacuum-arc deposition method Grudnitskiy, V.V. Beresnev, V.M. Drobyshevskaya, А.А. Turbin, P.V. Toryanik, I.N. Grankin, S.S. Kolesnikov, D.А. Nemchenko, U.S. Coatings on the basis Ti-Hf-Si-N system were synthesized by vacuum-arc deposition method from the uniflow and separated ion-plasma flow. The morphology, elemental and phase composition of coatings were investigated. The dependence of the characteristics of the coating from the physical and technological parameters of deposition was installed. The two-phase structure of the coating: a substitutional solution (Ti, Hf)N and quasiamorphous silikonitrid α-Si₃N₄ was determined. The factors that determine the compressive stresses in the coatings were considered. Методом вакуумно-дугового осаждения из прямоточного и сепарированного ионно-плазменного потока синтезированы покрытия на основе системы Ti-Hf-Si-N. Исследована морфология, определен элементный и фазовый состав покрытий. Установлена зависимость характеристик покрытий от физико-технологических параметров осаждения. Определена двухфазная структура покрытия: твердый раствор замещения (Ti, Hf)N и квазиаморфный силиконитрид α-Si₃N₄. Рассмотрены факторы, определяющие сжимающие напряжения в покрытиях. Методом вакуумно-дугового осадження з прямоточного і сепарованого іонно-плазмового потоку синтезовані покриття на основі системи Ti-Hf-Si-N. Досліджено морфологію, визначено елементний і фазовий склад покриттів. Встановлено залежність характеристик покриттів від фізико-технологічних параметрів осадження. Визначена двофазна структура покриття: твердий розчин заміщення (Ti, Hf) N і квазіаморфний силіконітрид α-Si₃N₄. Розглянуто чинники, що визначають стискаючі напруження у покриттях. 2012 Article Elemental and phase analysis of nanocomposite coatings on basis Ti-Hf-Si-N system received by the vacuum-arc deposition method / V.V. Grudnitskiy, V.M. Beresnev, А.А. Drobyshevskaya, P.V. Turbin, I.N. Toryanik, S.S. Grankin, D.А. Kolesnikov, U.S. Nemchenko // Физическая инженерия поверхности. — 2012. — Т. 10, № 3. — С. 286–294. — Бібліогр.: 14 назв. — англ. 1999-8074 http://dspace.nbuv.gov.ua/handle/123456789/98973 621.793: 539.61: 669.018: 620.1 en Физическая инженерия поверхности Науковий фізико-технологічний центр МОН та НАН України |
institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
collection |
DSpace DC |
language |
English |
description |
Coatings on the basis Ti-Hf-Si-N system were synthesized by vacuum-arc deposition method from
the uniflow and separated ion-plasma flow. The morphology, elemental and phase composition of
coatings were investigated. The dependence of the characteristics of the coating from the physical
and technological parameters of deposition was installed. The two-phase structure of the coating: a
substitutional solution (Ti, Hf)N and quasiamorphous silikonitrid α-Si₃N₄ was determined. The factors
that determine the compressive stresses in the coatings were considered. |
format |
Article |
author |
Grudnitskiy, V.V. Beresnev, V.M. Drobyshevskaya, А.А. Turbin, P.V. Toryanik, I.N. Grankin, S.S. Kolesnikov, D.А. Nemchenko, U.S. |
spellingShingle |
Grudnitskiy, V.V. Beresnev, V.M. Drobyshevskaya, А.А. Turbin, P.V. Toryanik, I.N. Grankin, S.S. Kolesnikov, D.А. Nemchenko, U.S. Elemental and phase analysis of nanocomposite coatings on basis Ti-Hf-Si-N system received by the vacuum-arc deposition method Физическая инженерия поверхности |
author_facet |
Grudnitskiy, V.V. Beresnev, V.M. Drobyshevskaya, А.А. Turbin, P.V. Toryanik, I.N. Grankin, S.S. Kolesnikov, D.А. Nemchenko, U.S. |
author_sort |
Grudnitskiy, V.V. |
title |
Elemental and phase analysis of nanocomposite coatings on basis Ti-Hf-Si-N system received by the vacuum-arc deposition method |
title_short |
Elemental and phase analysis of nanocomposite coatings on basis Ti-Hf-Si-N system received by the vacuum-arc deposition method |
title_full |
Elemental and phase analysis of nanocomposite coatings on basis Ti-Hf-Si-N system received by the vacuum-arc deposition method |
title_fullStr |
Elemental and phase analysis of nanocomposite coatings on basis Ti-Hf-Si-N system received by the vacuum-arc deposition method |
title_full_unstemmed |
Elemental and phase analysis of nanocomposite coatings on basis Ti-Hf-Si-N system received by the vacuum-arc deposition method |
title_sort |
elemental and phase analysis of nanocomposite coatings on basis ti-hf-si-n system received by the vacuum-arc deposition method |
publisher |
Науковий фізико-технологічний центр МОН та НАН України |
publishDate |
2012 |
url |
http://dspace.nbuv.gov.ua/handle/123456789/98973 |
citation_txt |
Elemental and phase analysis of nanocomposite coatings on basis Ti-Hf-Si-N system received by the vacuum-arc deposition method / V.V. Grudnitskiy, V.M. Beresnev, А.А. Drobyshevskaya, P.V. Turbin, I.N. Toryanik, S.S. Grankin, D.А. Kolesnikov, U.S. Nemchenko // Физическая инженерия поверхности. — 2012. — Т. 10, № 3. — С. 286–294. — Бібліогр.: 14 назв. — англ. |
series |
Физическая инженерия поверхности |
work_keys_str_mv |
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first_indexed |
2023-10-18T20:00:54Z |
last_indexed |
2023-10-18T20:00:54Z |
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