Magnetron sputtering of high temperature composite ceramics AlN-TiB₂-TiSi₂

• Published in: Физическая инженерия поверхности
• Date: 2013
• Main Authors: Torianik, I.N., Beresnev, V.M., Pogrebnjak, A.D., Sobol, O.V., Beresneva, Ye.V., Podcherniaieva, I.A., Kropotov, A.Yu., Stiervoiedov, N.G., Turbin, P.V., Kolesnikov, D.A., Grankin, S.S., Nyemchenko, U.S., Srebniuk, P.A., Novikov, V.Yu.
• Format: Article
• Language: English
• Published: Науковий фізико-технологічний центр МОН та НАН України 2013
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/100317
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Magnetron sputtering of high temperature composite ceramics AlN-TiB₂-TiSi₂ / I.N. Torianik, V.M. Beresnev, A.D. Pogrebnjak, O.V. Sobol, Ye.V. Beresneva, I.A. Podcherniaieva, A.Yu. Kropotov, N.G. Stiervoiedov, P.V. Turbin, D.A. Kolesnikov, S.S. Grankin, U.S. Nyemchenko, P.A. Srebniuk, V.Yu. Novikov // Физическая инженерия поверхности. — 2013. — Т. 11, № 3. — С. 299–303. — Бібліогр.: 13 назв. — англ.

By means of the magnetron sputtering method using the DC and pulsed voltages applied to the target, the coatings based on AlN-TiB₂-TiSi₂ ceramics were obtained. An amorphous-like structure of the obtained coatings was revealed. It had the area of ordering ~ 1 nm and the viscoplasticity coefficie...