Turtsevich, A., & Nalivaiko, O. (2015). Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system. Технология и конструирование в электронной аппаратуре.
Chicago Style (17th ed.) CitationTurtsevich, A.S, and O.Y Nalivaiko. "Deposition of Borophosphosilicate Glass Films Using the TEOS–dimethylphosphite–trimethylborate System." Технология и конструирование в электронной аппаратуре 2015.
MLA (8th ed.) CitationTurtsevich, A.S, and O.Y Nalivaiko. "Deposition of Borophosphosilicate Glass Films Using the TEOS–dimethylphosphite–trimethylborate System." Технология и конструирование в электронной аппаратуре, 2015.
Warning: These citations may not always be 100% accurate.