Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system

• Published in: Технология и конструирование в электронной аппаратуре
• Date: 2015
• Main Authors: Turtsevich, A.S., Nalivaiko, O.Y.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2015
• Subjects: Материалы электроники
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/100479
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system / A.S. Turtsevich, O.Y. Nalivaiko // Технология и конструирование в электронной аппаратуре. — 2015. — № 1. — С. 49-58. — Бібліогр.: 34 назв. — англ.

Modernization of horizontal low pressure deposition system has been performed. The liquid source delivery system using the bubblers has been developed. The PSG and BPSG film deposition processes and film properties using TEOS-Dimethylphosphite-TEB system have been studied. It is shown that the use o...