New Method and Tool for TEM Samples Preparation

• Published in: Металлофизика и новейшие технологии
• Date: 2013
• Main Authors: Boguslavsky, D., Cherepin, V., Polubotko, Y., Smith, C.
• Format: Article
• Language: English
• Published: Інститут металофізики ім. Г.В. Курдюмова НАН України 2013
• Subjects: Металлические поверхности и плёнки
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/104073
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: New Method and Tool for TEM Samples Preparation / D. Boguslavsky, V. Cherepin, Y. Polubotko, C. Smith // Металлофизика и новейшие технологии. — 2013. — Т. 35, № 2. — С. 163-173. — Бібліогр.: 8 назв. — англ.

А new tool for TEM sample preparation, which allows preparing a thin lamella with thickness less than 20 nm surrounded by and embedded in bulk material, is presented. The main advantages of this system are low ion milling induced damage (less than 2 nm in depth), low process time (1—2 hours), in sit...