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Calculation of macroparticle flow in filtered vacuum ARC plasma systems

Model of macroparticle behavior inside plasma guiding channels of vacuum arc systems and program for calculation of macroparticle flow in plasma filters (separators) used in vacuum arc film deposition are described. Several magnetic filters have been modeled to compare calculated and experimental da...

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Bibliographic Details
Published in:	Вопросы атомной науки и техники
Date:	2012
Main Author:	Aksyonov, D.S.
Format:	Article
Language:	English
Published:	Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2012
Subjects:	Физика радиационных и ионно-плазменных технологий
Online Access:	https://nasplib.isofts.kiev.ua/handle/123456789/108630
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Journal Title:	Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:	Calculation of macroparticle flow in filtered vacuum ARC plasma systems / D.S. Aksyonov // Вопросы атомной науки и техники. — 2012. — № 2. — С. 108-113. — Бібліогр.: 4 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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