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Kinetic simulation of low pressure RF discharge in nonuniform axisymmetric magnetic field

An implicit 2D3V PIC/MCC code has been developed for the kinetic simulation of low pressure RF discharges. The code uses coupled particle-in-cell method (PIC) for calculation collisionless dynamic of the plasma particles and Monte-Carlo method (MCC) for taking in account the particle collisions. For...

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Veröffentlicht in:	Вопросы атомной науки и техники
Datum:	2012
1. Verfasser:	Olshansky, V.V.
Format:	Artikel
Sprache:	Englisch
Veröffentlicht:	Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2012
Schlagworte:	Фундаментальная физика плазмы
Online Zugang:	https://nasplib.isofts.kiev.ua/handle/123456789/109107
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:	Kinetic simulation of low pressure RF discharge in nonuniform axisymmetric magnetic field / V.V. Olshansky // Вопросы атомной науки и техники. — 2012. — № 6. — С. 77-80. — Бібліогр.: 9 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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