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Kinetic simulation of low pressure RF discharge in nonuniform axisymmetric magnetic field

An implicit 2D3V PIC/MCC code has been developed for the kinetic simulation of low pressure RF discharges. The code uses coupled particle-in-cell method (PIC) for calculation collisionless dynamic of the plasma particles and Monte-Carlo method (MCC) for taking in account the particle collisions. For...

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Bibliographic Details
Published in:Вопросы атомной науки и техники
Date:2012
Main Author: Olshansky, V.V.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2012
Subjects:
Фундаментальная физика плазмы
Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/109107
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Kinetic simulation of low pressure RF discharge in nonuniform axisymmetric magnetic field / V.V. Olshansky // Вопросы атомной науки и техники. — 2012. — № 6. — С. 77-80. — Бібліогр.: 9 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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