Technological aprobation of integral cluster setup for complex compound composites syntesis

• Published in: Вопросы атомной науки и техники
• Date: 2012
• Main Authors: Yakovin, S., Dudin, S., Zykov, A., Shyshkov, A., Farenik, V.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2012
• Subjects: Низкотемпературная плазма и плазменные технологии
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/109200
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Technological aprobation of integral cluster setup for complex compound composites syntesis / S. Yakovin, S. Dudin, A. Zykov, A. Shyshkov, V. Farenik // Вопросы атомной науки и техники. — 2012. — № 6. — С. 220-222. — Бібліогр.: 6 назв. — англ.

In the present paper the results of technological approbation of the integral cluster set-up for synthesis of various types of high-quality coatings such as Al₂O₃, TiO₂, ZrO₂, AlN, TiN, and others with coating thickness up to 10 mkm are presented. Сurrent-voltage characteristics of magnetron dischar...