Stochastic heating of electrons in capacitive RF discharges by plasma oscillations

• Published in: Вопросы атомной науки и техники
• Date: 2012
• Main Author: Manuilenko, O.V.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2012
• Subjects: Низкотемпературная плазма и плазменные технологии
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/109205
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Stochastic heating of electrons in capacitive RF discharges by plasma oscillations / O.V. Manuilenko // Вопросы атомной науки и техники. — 2012. — № 6. — С. 205-207. — Бібліогр.: 12 назв. — англ.

Stochastic heating of electrons by plasma oscillations excited in the capacitive discharge plasma is investigated theoretically. We have obtained criteria, when the stochastic heating take place, and demonstrated numerically that this heating mechanism can be sufficiently effective. Изучен стохастич...