Dependence of RF breakdown curve on electrode geometry in CCP reactor

• Published in: Вопросы атомной науки и техники
• Date: 2012
• Main Authors: Dudin, S.V., Dakhov, A.N., Lisovskiy, V.A., Pletniov, V.M.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2012
• Subjects: Низкотемпературная плазма и плазменные технологии
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/109209
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Dependence of RF breakdown curve on electrode geometry in CCP reactor / S.V. Dudin, A.N. Dakhov, V.A. Lisovskiy, V.M. Pletniov // Вопросы атомной науки и техники. — 2012. — № 6. — С. 193-195. — Бібліогр.: 10 назв. — англ.

The results of experimental and theoretical study of RF capacitively coupled discharge breakdown in reactor for reactive ion etching of semiconductors are presented. Taking into account complex geometry of the reactor with asymmetric electrodes the main attention has been paid to influence of geomet...