High-current pulsed operation modes of the planar MSS with magnetically insulated anode without transition to the arc discharge

• Published in: Вопросы атомной науки и техники
• Date: 2012
• Main Authors: Bizyukov, A.A., Sereda, K.N., Sleptsov, V.V., Tarasov, I.K., Chunadra, A.G.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2012
• Subjects: Низкотемпературная плазма и плазменные технологии
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/109210
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: High-current pulsed operation modes of the planar MSS with magnetically insulated anode without transition to the arc discharge / A.A. Bizyukov, K.N. Sereda, V.V. Sleptsov, I.K. Tarasov, A.G. Chunadra // Вопросы атомной науки и техники. — 2012. — № 6. — С. 190-192. — Бібліогр.: 6 назв. — англ.

In this work, the characteristics of high-current operation modes of planar magnetron sputtering system with magnetically insulated anode without going to the arc discharge mode is investigated. The possibility of using an additional spatially modulated magnetic field in the anode region to prevent...