Measurements of wall conditioning rate at Uragan-2M

An experiment on chamber RF cleaning for 12 hours a day during 2 weeks with the subsequent vacuum pumping out was carried out. The plasma was produced by the UHF generator with the frequency of 2.4 GHz. Afterwards, the VHF generator working at the frequency of 132 MHz in a continuous mode was turned...

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Published in:Вопросы атомной науки и техники
Date:2013
Main Authors: Baron, D.I., Chernyshenko, V.Ya., Korovin, V.B., Kramskoy, E.D., Maznichenko, S.M., Shtan, A.F., Solodovchenko, S.I.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2013
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Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/109253
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Measurements of wall conditioning rate at Uragan-2M / D.I. Baron, V.Ya. Chernyshenko, V.B. Korovin, E.D. Kramskoy, S.M. Maznichenko, A.F. Shtan, S.I. Solodovchenko // Вопросы атомной науки и техники. — 2013. — № 1. — С. 21-23. — Бібліогр.: 3 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine