Plasma technologies for manufacturing of micro-strip metal detectors of ionizing radiation

• Published in: Вопросы атомной науки и техники
• Date: 2007
• Main Authors: Pugatch, V.M., Perevertaylo, V.L., Fedorovich, O.A., Borisenko, A.G., Kostin, E.G., Kruglenko, M.P., Polozov, B.P., Tarasenko, L.I.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2007
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/110503
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Plasma technologies for manufacturing of micro-strip metal detectors of ionizing radiation / V.M. Pugatch, V.L. Perevertaylo, O.A. Fedorovich, A.G. Borisenko, E.G. Kostin, M.P. Kruglenko, B.P. Polozov, L.I. Tarasenko // Вопросы атомной науки и техники. — 2007. — № 1. — С. 173-175. — Бібліогр.: 4 назв. — англ.

The manufacturing of elements of micro-strip metal detectors (MSMD) for ionizing radiation applying plasma-chemistry technologies for etching of multilayer structures is described in details. Results obtained by using plasma-chemistry technologies for MSMD production as well as its advantages in com...