Cylindrical magnetron based on the plasmaoptical principles

• Published in: Вопросы атомной науки и техники
• Date: 2007
• Main Authors: Dobrovol's'kii, A.M., Evsyukov, A.N., Goncharov, A.A., Protsenko, I.M.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2007
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/110509
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Cylindrical magnetron based on the plasmaoptical principles / A.M. Dobrovol's'kii, A.N. Evsyukov, A.A. Goncharov, I.M. Protsenko // Вопросы атомной науки и техники. — 2007. — № 1. — С. 151-153. — Бібліогр.: 7 назв. — англ.

The operation of any magnetron-type sputtering system is based on using of anomalous glow discharge in a crossed E ┴ B fields. In such systems a principle of magnetic isolation of electrons is realized and idea of magnetic lines equipotentialization for control of ions flow on cathode-target can be...