Dynamics of nitrogen and xenon plasma streams generated by MPC device
Magnetoplasma compressor (MPC) of compact geometry is developed for generation of dense plasma streams of different working gases. Discharge characteristics and parameters of the plasma streams, generated by MPC in different modes of operation are investigated. Dynamics of compression zone formation...
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| Опубліковано в: : | Вопросы атомной науки и техники |
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| Дата: | 2007 |
| Автори: | , , , , , , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2007
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| Цитувати: | Dynamics of nitrogen and xenon plasma streams generated by MPC device / V.V. Chebotarev, I.E. Garkusha, M.S. Ladygina, A.K. Marchenko, Yu.V. Petrov, D.G. Solyakov, A.V. Tsarenko, V.I. Tereshin, S.A. Trubchaninov, D.V. Yelisyeyev, A. Hassanein // Вопросы атомной науки и техники. — 2007. — № 1. — С. 104-106. — Бібліогр.: 5 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1859970288171614208 |
|---|---|
| author | Chebotarev, V.V. Garkusha, I.E. Ladygina, M.S. Marchenko, A.K. Petrov, Yu.V. Solyakov, D.G. Tsarenko, A.V. Tereshin, V.I. Trubchaninov, S.A. Yelisyeyev, D.V. Hassanein, A. |
| author_facet | Chebotarev, V.V. Garkusha, I.E. Ladygina, M.S. Marchenko, A.K. Petrov, Yu.V. Solyakov, D.G. Tsarenko, A.V. Tereshin, V.I. Trubchaninov, S.A. Yelisyeyev, D.V. Hassanein, A. |
| citation_txt | Dynamics of nitrogen and xenon plasma streams generated by MPC device / V.V. Chebotarev, I.E. Garkusha, M.S. Ladygina, A.K. Marchenko, Yu.V. Petrov, D.G. Solyakov, A.V. Tsarenko, V.I. Tereshin, S.A. Trubchaninov, D.V. Yelisyeyev, A. Hassanein // Вопросы атомной науки и техники. — 2007. — № 1. — С. 104-106. — Бібліогр.: 5 назв. — англ. |
| collection | DSpace DC |
| container_title | Вопросы атомной науки и техники |
| description | Magnetoplasma compressor (MPC) of compact geometry is developed for generation of dense plasma streams of different working gases. Discharge characteristics and parameters of the plasma streams, generated by MPC in different modes of operation are investigated. Dynamics of compression zone formation and energy efficiency of MPC are analyzed.
Створено магніто-плазмовий компресор (МПК) компактної геометрії для генерації густих плазмових потоків різних газів. Досліджено характеристики розрядів і параметри плазмових потоків, що генеруються МПК у різних режимах роботи. Проаналізовано динаміку формування зони компресії й енергетичну ефективність МПК.
Создан магнито-плазменный компрессор (МПК) компактной геометрии для генерации плотных плазменных потоков различных газов. Исследованы характеристики разрядов и параметры плазменных потоков, генерируемых МПК в различных режимах работы. Проанализированы динамика формирования зоны компрессии и энергетическая эффективность МПК.
|
| first_indexed | 2025-12-07T16:21:44Z |
| format | Article |
| fulltext |
104 Problems of Atomic Science and Technology. 2007, 1. Series: Plasma Physics (13), p. 104-106
DYNAMICS OF NITROGEN AND XENON PLASMA STREAMS
GENERATED BY MPC DEVICE
V.V. Chebotarev, I.E Garkusha, M.S.Ladygina, A.K.Marchenko, Yu.V. Petrov,
D.G. Solyakov, , V.I. Tereshin, S.A.Trubchaninov, D.V. Yelisyeyev,
A.Hassanein1
Institute of Plasma Physics, NSC “Kharkov Institute of Physics and Technology”,
Kharkov, Ukraine, e-mail: garkusha@ipp.kharkov.ua;
1Argonne National Laboratory, USA
Magnetoplasma compressor (MPC) of compact geometry is developed for generation of dense plasma streams of
different working gases. Discharge characteristics and parameters of the plasma streams, generated by MPC in different
modes of operation are investigated. Dynamics of compression zone formation and energy efficiency of MPC are
analyzed.
PACS: 52.59.Dk; 52.50.Gj; 52.30.-q.
INTRODUCTION
Pinching plasmas are remained to be of great interest
for solving of many fundamental problems of high-energy
density physics and for different technological
applications [1]. In particular, dense plasma generated
with powerful electrical discharges is considered as
candidate-source of extreme ultraviolet (EUV) radiation
for the optical lithography. Gas discharge plasma sources
may have the potential advantages as far as they can be
simpler in design, compact and cost-effective.
The paper presents the investigations of nitrogen and
xenon plasma streams generated by magnetoplasma
compressor (MPC) of compact geometry with conical-
shaped electrodes and pulse gas supply. This device
makes possible the investigations of plasma compression
dynamics in focus region, peculiarities of generations of
EUV and soft X-ray radiation from the focus and features
of plasma-surface interaction in high current pinching
discharges, operating with heavy noble gases [2, 3]. The
main attention in present experiments is paid to
investigations of xenon plasma streams parameters and
MPC operation regimes.
EXPERIMENTAL DEVICE
MPC consists of two copper coaxial electrodes with
disk current collector (separated by figured combined
insulator) and pulse gas supply system. The outer
electrode has solid cylindrical part of 110 mm in diameter
and 147 mm in length and also output rod structure
including 12 copper rods with diameter of 10mm and
length of 147mm. The rods form the frustum of cone
surface with apex angle of 300 as it is shown in Fig.1.
Design of MPC device is described in detail in [4].
MPC was installed into vacuum chamber with
diameter 42 cm and length 130 cm. Working pressure in
vacuum chamber 10-6 Torr. Nitrogen and xenon were
used as working gases. Condenser bank with capacitance
of 90 µF and maximal voltage of 25 kV was used for
power supply of main discharge in MPC.
High-speed camera, spectrograph DFS-452 and
DR-23 monochromator were applied for plasma density
and temperature estimations. AXUV photodiodes were
used for EUV radiation intensity measurements.
Rogowski coils, compensated high voltage divider,
electric and magnetic probes, movable calorimeter and
piezodetectors were used for plasma parameters
measurements.
CHARACTERISTICS OF MPC DISCHARGE
Operational regimes of the plasma source have been
varied by changing the volume of gas, injected into
accelerating channel, and by change of the time delay
between start of gas injection and discharge ignition.
Integral mass flow rate was changed from 5 to 30 cm3.
Typical wave forms of discharge current and voltage
presented in Fig.2.
Fig. 1. Block scheme of MPC device
Fig. 2. Discharge current and voltage, Xe,
Uc = 20 kV, ∆t= 550 µs, ∆V=10 cm3
A.V.Tsarenko
mailto:garkusha@ipp.kharkov.ua
105
Current-voltage characteristics (CVC) were measured
in different accelerator modes of operations. The
discharge voltage was measured at the time moment
corresponding the maximum of discharge current when
L
dt
dI =0. Typical current-voltage characteristics for xenon
discharge are shown in Fig. 3. Current-voltage
characteristics can be approximated by power function
m
d
d I
IU
&
β
η ⋅∝ , where Id, Ud – discharge current and
voltage correspondently, Im- effective mass flow rate, -
accelerator efficiency. As it was found in present
experiments the power is about ≈ 3 for nitrogen and
about 2 for xenon. In spite of the same value of discharge
current the discharge voltage is decreased with increasing
mass of working gas.
Time dependencies of discharge current and voltage
were used for estimation of energy fraction passed from
capacitor bank into accelerator. This energy was
calculated as ∫ ⋅=
T
dd dttUtIQ
0
)()( , where T – time
moment when discharge voltage changes sign.
The energy delivered to the discharge channel is
increased with increasing capacitor voltage and this
dependence can be described by power function with
power ~ 2. This is consequence of increasing active part
of total impedance of the electrical circuit with increase of
capacitor voltage due to higher plasma stream density and
velocity. The total energy containment in plasma stream,
measured by local calorimeter, is about (5-7) % of the
energy stored in capacitor bank.
PLASMA STREAM PARAMETERS
Plasma stream velocity
The plasma stream velocity was estimated by time –
of-flight method between two photo diodes installed
along the vacuum chamber. Average velocity of nitrogen
plasma stream is achieved 2.7×107 cm/s at discharge
current of 320 kA. Average xenon plasma stream velocity
is smaller and the measured value is (3-4)×106 cm/s at
discharge current 500 kA.
Time dependence of xenon plasma stream velocity
obtained from the shift of radiation peaks on photodiodes
signals is shown in Fig. 4. As follows from these
measurements the maximum value xenon plasma stream
velocity is (6-8)×106 cm/s and it achieved after 10-12 µs
from the discharge start (t = 0). For later time moments
t=35-40 µs the velocity drops to (2-3)×106cm/s. The
duration of plasma stream generation estimated as period
of time when stream velocity decreased in two times is ~
5-10 µs.
Plasma stream density distribution
The electron density distributions were measured from
the broadening of XeII and XeIII spectral lines in visible
wavelength range. Results of electron density
measurements at the different distances from MPC output
are presented in Fig 5. Density value calculated from
single and double ionized xenon atoms differs not
significantly. Electron temperature estimated from the
ratio of XeIII/XeII intensities is about 2.5-3 eV in all
operation regimes. This value corresponds to the
peripheral region of plasma stream. For temperature
measurements in the core of compression region, EUV
spectroscopy should be applied.
High speed imaging
High-speed imaging of the plasma discharge, which
illustrates the compression dynamics, is carried out in
frame-by-frame regime. Time resolution is 1 s.
Evolution of MPC discharge and formation of
compression region are presented in Fig.6. As it is seen,
focus is formed at the distance of 8-10 cm from MPC
0 100 200 300 400 500 600
0.0
0.6
1.2
1.8
2.4
∆V(Xe)=10 cm3
∆t=500 µs
U
, k
V
I,kA
∆t=700 µs
∆t=600 µs
∆t=550 µs
Fig. 3. Current-voltage characteristics for xenon
discharges in MPC
0 10 20 30 40 50
0
2
4
6
8
10
V
*1
06 , c
m
/s
t, µs
Fig. 4. Time dependence of xenon plasma stream
velocity; Id=400 kA; ∆V=10 cm3; ∆t=500 µs
0 4 8 12 16 20
1
2
3
4
5
6
XeII (t=500 ms)
XeII (t=550 ms)
XeIII (t=500 ms)
XeIII (t=550 ms)
Te (XeII/II) = 1 - 2 eV
Te (XeIII/II) = 2,3 - 2,6 eV
working gas - Xe, U = 20 kV, V = 10 cm3
N
e*
10
17
, c
m
-3
Distance, cm
anode
cathode
Fig. 5. Spatial distributions of electron density in
Xe plasma; Id=400 kA; ∆V=10 cm3
106
output after 6-10 s from the discharge start. The average
focus diameter is ~ 1-2 cm and the length is 2-4 cm.
EUV radiation
AXUV 20Mo/Si photodiodes (wave range of
12.2-15.8 nm) were used for analysis of plasma stream
radiation. AXUV were installed into the tube and adjusted
to vacuum chamber through special system, which gives
possibility for changing direction of measurements. The
radiation intensity is increased more than in three times
with increasing capacitor voltage by 30% from 15 to
20 kV. At the same time the intensity of radiation in
visible wave range, measured by conventional
photodiodes, increased less than in two times.
DISCUSSION AND CONCLUSIONS
MPC of compact geometry is developed for
generation of dense plasma streams of different working
gases. The main electro-technical characteristics are
investigated. Volt-ampere characteristics can be described
by power function with power ~ 3 for nitrogen and ~ 2 for
xenon working gas. The average plasma stream velocity
can be described by function [5] id MIv α∝ , where
v – plasma stream velocity, Id – discharge current and
Mi – mass of working gas. Discharge voltage can be
described by ∫ ⋅∝ drrHrvUd )()( ϕ
, where v(r)– radial
distribution of plasma velocity and Hϕ(r) – azimuthal
component of magnetic field in discharge channel. Thus,
for the same value of discharge current the discharge
voltage is decreased with increasing mass of working gas.
Maximal energy in xenon plasma stream measured by
movable calorimeter is about (5-7) % of the energy in
capacitor banks. The energy containment in plasma
stream strongly depends on MPC operation mode. For
example, it drops from 1.8 kJ to 0.4-0.45 kJ with
increasing time delay of the discharge from 500 to 550 µs.
The average plasma stream velocity at the MPC output
achieves 2.7×107 cm/s and 3×106 cm/s for operation with
nitrogen and xenon accordingly. Maximum velocity
corresponds to the front of xenon plasma stream and
achieves (6-8)×106 cm/s. Then it drops in two times
during 5-10 µs.
Compression zone with diameter of 1-2 cm and the
length of 2-4 cm is formed at the distance of 8-10 cm
from the central electrode. The maximum value of
electron density in focus zone is Ne ≈ 2×1018 cm-3 for
nitrogen and (4-5)×1017 cm-3 for xenon plasma. Time
averaged electron temperature (during all discharge) at
the MPC output is 7-8 eV for nitrogen and 2-3 eV for
xenon plasma respectively. The measured values
correspond to the peripheral region of the plasma stream.
First results of plasma radiation measurements in EUV
wave range of 12.2-15.8 nm, obtained with AXUV
photodiodes are presented.
REFERENCES
1. A.V. Dubrovsky et al. // Journal of Tekh. Phys.
Poland. 1998, v. 39, p.133-139.
2. Encyclopedia of Low-Temperature Plasma / Ed. by
V. Fortov, v. 3, 4, 2000 (in Russian).
3. V.Y. Banine, J.P.H. Benschop et al. Comparison of
Extreme Ultraviolet Sources for Lithography
Applications // Microelectronic Engineering. 2000,
v. 53, p. 681-684.
4. V.V. Chebotarev et. al Investigation of pinching
discharge in MPC device operating with nitrogen and
xenon gases // Chechoslovak Journal of physics. 2006,
v. 56, Suppl. B, p. 335-341.
5. A.I. Morozov. Printsipy koaksialnyh kvazistatsionarnyh
plasmennyah uskiriteley // Sov. J. Plasm. Phys. 1990,
v. 16(2), p. 131-145(in Russian).
,
. , . , . , . . , . , ,
. , . , . , .
( )
. ,
.
.
,
. , . , . , . , . , . , ,
. , . , . , .
( )
. ,
.
.
Fig. 6. Xenon plasma stream. Id=400 kA; 10 cm3;
∆t=500 µs
.
O. .
|
| id | nasplib_isofts_kiev_ua-123456789-110535 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-12-07T16:21:44Z |
| publishDate | 2007 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Chebotarev, V.V. Garkusha, I.E. Ladygina, M.S. Marchenko, A.K. Petrov, Yu.V. Solyakov, D.G. Tsarenko, A.V. Tereshin, V.I. Trubchaninov, S.A. Yelisyeyev, D.V. Hassanein, A. 2017-01-04T18:32:10Z 2017-01-04T18:32:10Z 2007 Dynamics of nitrogen and xenon plasma streams generated by MPC device / V.V. Chebotarev, I.E. Garkusha, M.S. Ladygina, A.K. Marchenko, Yu.V. Petrov, D.G. Solyakov, A.V. Tsarenko, V.I. Tereshin, S.A. Trubchaninov, D.V. Yelisyeyev, A. Hassanein // Вопросы атомной науки и техники. — 2007. — № 1. — С. 104-106. — Бібліогр.: 5 назв. — англ. 1562-6016 PACS: 52.59.Dk; 52.50.Gj; 52.30.-q https://nasplib.isofts.kiev.ua/handle/123456789/110535 Magnetoplasma compressor (MPC) of compact geometry is developed for generation of dense plasma streams of different working gases. Discharge characteristics and parameters of the plasma streams, generated by MPC in different modes of operation are investigated. Dynamics of compression zone formation and energy efficiency of MPC are analyzed. Створено магніто-плазмовий компресор (МПК) компактної геометрії для генерації густих плазмових потоків різних газів. Досліджено характеристики розрядів і параметри плазмових потоків, що генеруються МПК у різних режимах роботи. Проаналізовано динаміку формування зони компресії й енергетичну ефективність МПК. Создан магнито-плазменный компрессор (МПК) компактной геометрии для генерации плотных плазменных потоков различных газов. Исследованы характеристики разрядов и параметры плазменных потоков, генерируемых МПК в различных режимах работы. Проанализированы динамика формирования зоны компрессии и энергетическая эффективность МПК. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Plasma dynamics and plasma wall interaction Dynamics of nitrogen and xenon plasma streams generated by MPC device Динаміка азотних і ксенонових плазмових потоків, що генеруються МПК Динамика азотных и ксеноновых плазменных потоков, генерируемых МПК Article published earlier |
| spellingShingle | Dynamics of nitrogen and xenon plasma streams generated by MPC device Chebotarev, V.V. Garkusha, I.E. Ladygina, M.S. Marchenko, A.K. Petrov, Yu.V. Solyakov, D.G. Tsarenko, A.V. Tereshin, V.I. Trubchaninov, S.A. Yelisyeyev, D.V. Hassanein, A. Plasma dynamics and plasma wall interaction |
| title | Dynamics of nitrogen and xenon plasma streams generated by MPC device |
| title_alt | Динаміка азотних і ксенонових плазмових потоків, що генеруються МПК Динамика азотных и ксеноновых плазменных потоков, генерируемых МПК |
| title_full | Dynamics of nitrogen and xenon plasma streams generated by MPC device |
| title_fullStr | Dynamics of nitrogen and xenon plasma streams generated by MPC device |
| title_full_unstemmed | Dynamics of nitrogen and xenon plasma streams generated by MPC device |
| title_short | Dynamics of nitrogen and xenon plasma streams generated by MPC device |
| title_sort | dynamics of nitrogen and xenon plasma streams generated by mpc device |
| topic | Plasma dynamics and plasma wall interaction |
| topic_facet | Plasma dynamics and plasma wall interaction |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/110535 |
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