Solid ion source based on hollow-cylindrical magnetron sputtering discharge

• Published in: Вопросы атомной науки и техники
• Date: 2003
• Main Authors: Azarenkov, N.A., Bizyukov, A.A., Bizyukov, I.A., Bobkov, V.V., Kashaba, A.E., Krieger, K., Sereda, K.N., Tarasov, I.K.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2003
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/110538
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Solid ion source based on hollow-cylindrical magnetron sputtering discharge / N.A. Azarenkov, A.A. Bizyukov, I.A. Bizyukov, V.V. Bobkov, A.E. Kashaba, K. Krieger, K.N. Sereda, I.K. Tarasov // Вопросы атомной науки и техники. — 2003. — № 1. — С. 125-127. — Бібліогр.: 5 назв. — англ.

A new solid ion source is described. The ion source based on hollow-cylindrical magnetron sputtering discharge produces the beam of various solid ions (B, C, Si, Ti, V, Fe, Ni, Ta, W) which are then extracted by an ion optical accelerating system. In this ion source DC discharge is used for generati...