APA (7th ed.) Citation

Fedorchenko, V., Chebotarev, V., Medvedev, A., & Tereshin, V. (2007). Deposition of refractory metal films with planar plasma ECR source. Вопросы атомной науки и техники.

Chicago Style (17th ed.) Citation

Fedorchenko, V.D, V.V Chebotarev, A.V Medvedev, and V.I Tereshin. "Deposition of Refractory Metal Films with Planar Plasma ECR Source." Вопросы атомной науки и техники 2007.

MLA (8th ed.) Citation

Fedorchenko, V.D, et al. "Deposition of Refractory Metal Films with Planar Plasma ECR Source." Вопросы атомной науки и техники, 2007.

Warning: These citations may not always be 100% accurate.