Modernized equipment for plasmachemical etching of insulation of p-n transition of photoelectric converters

• Published in: Вопросы атомной науки и техники
• Date: 2007
• Main Authors: Fedorovich, O.A., Kruglenko, M.P., Lukomskij, D.V., Marinenko, A.A., Polozov, B.P.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2007
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/110578
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Modernized equipment for plasmachemical etching of insulation of p-n transition of photoelectric converters/ O.A. Fedorovich, M.P. Kruglenko, D.V. Lukomskij, A.A. Marinenko, B.P. Polozov // Вопросы атомной науки и техники. — 2007. — № 1. — С. 203-205. — Бібліогр.: 5 назв. — англ.

Basic problems arising at the processing of the insulation of p-n transition of photo converters at the conditions of batch production with the use of the industrial plant "Carter" are determined. The way of elimination of these problems is shown. The modernized plant "Carter" ha...