Oxygen activation effect on reactive magnetron synthesis of alumina coatings

• Published in: Вопросы атомной науки и техники
• Date: 2007
• Main Authors: Walkowicz, J., Zykov, A.V., Dudin, S.V., Yakovin, S.D.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2007
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/110582
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Oxygen activation effect on reactive magnetron synthesis of alumina coatings / J. Walkowicz, A.V. Zykov, S.V. Dudin, S.D. Yakovin // Вопросы атомной науки и техники. — 2007. — № 1. — С. 194-196. — Бібліогр.: 5 назв. — англ.

The investigation results of the DC magnetron sputtering system for synthesis of high-quality oxide coatings are presented. In the system oxygen, activated by an independent Inductively-Coupled Plasma (ICP) source, is introduced into an aluminum sputtering chamber as an alternative to conventional r...