Application of the modified plasma accelerator for amorphous diamond-like films production

• Veröffentlicht in: Вопросы атомной науки и техники
• Datum: 2003
• Hauptverfasser: Bizukov, A.A., Borisko, V.N., Kashaba, А.Е., Sereda, К.D., Yunakov, N.N., Zinov’ev, D.V.
• Format: Artikel
• Sprache: English
• Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2003
• Schlagworte: Low temperature plasma and plasma technologies
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/110615
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Application of the modified plasma accelerator for amorphous diamond-like films production / A.A. Bizukov, V.N. Borisko, А.Е. Kashaba, К.D. Sereda, N.N. Yunakov, D.V. Zinov’ev // Вопросы атомной науки и техники. — 2003. — № 1. — С. 144-146. — Бібліогр.: 9 назв. — англ.

In the paper the problem of diamond-like films production by sputtering of a graphite target in the modified plasma accelerator with closed electrons drift is considered. The diamond-like films with thickness 40...400 nm with deposition velocity 200...400 nm/hour were received. For production of hyd...