The energy balance of the asymmetric combined inductive-capacitive RF discharge at low pressure

• Published in: Вопросы атомной науки и техники
• Date: 2003
• Main Authors: Zykov, A.V., Polozhiy, K.I., Farenik, V.I.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2003
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/110619
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: The energy balance of the asymmetric combined inductive-capacitive RF discharge at low pressure / A.V. Zykov, K.I. Polozhiy, V.I. Farenik // Вопросы атомной науки и техники. — 2003. — № 1. — С. 130-132. — Бібліогр.: 12 назв. — англ.

The combined inductive-capacitive RF discharge at low gas pressure is considered for a case of collisionless ion motion. The power distribution model in the combined RF discharge in case of two asymmetric RF electrodes is developed in term of a ratio of the electrode areas and in term of a magnitude...