Low-vacuum gas-discharge electron guns on the basis of high voltage glow discharge
Investigation results of the proposed methods of rise of pressure in low-vacuum gas-discharge electron guns based on the high voltage glow discharge with a hollow anode are presented. The influence of design parameters, cathode material, and sort of the technological gas on working pressure is consi...
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2008
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| Cite this: | Low-vacuum gas-discharge electron guns on the basis of high voltage glow discharge / V.A. Tutyk // Вопросы атомной науки и техники. — 2008. — № 6. — С. 156-158. — Бібліогр.: 7 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1859800426776363008 |
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| author | Tutyk, V.A. |
| author_facet | Tutyk, V.A. |
| citation_txt | Low-vacuum gas-discharge electron guns on the basis of high voltage glow discharge / V.A. Tutyk // Вопросы атомной науки и техники. — 2008. — № 6. — С. 156-158. — Бібліогр.: 7 назв. — англ. |
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| container_title | Вопросы атомной науки и техники |
| description | Investigation results of the proposed methods of rise of pressure in low-vacuum gas-discharge electron guns based on the high voltage glow discharge with a hollow anode are presented. The influence of design parameters, cathode material, and sort of the technological gas on working pressure is considered. The possibility of low-vacuum gas-discharge electron guns operation in the medium and low vacuum at pressure in the range of 10-1000 Pa is proved.
Наведено результати дослідження запропонованих методів підвищення робочого в низьковакуумних газорозрядних електронних пушках, заснованих на високовольтному тліючому розряді з порожнистим анодом. Експериментально доведена можливість роботи низьковакуумних газорозрядних електронних пушок при тисках у діапазоні 10...1000 Па.
Приведены результаты исследования предложенных методов повышения рабочего давления в низковакуумных газоразрядных электронных пушках, основанных на высоковольтном тлеющем разряде с полым анодом. Экспериментально доказана возможность работы низковакуумных газоразрядных электронных пушек при давлениях в диапазоне 10...1000 Па.
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| first_indexed | 2025-12-07T15:12:45Z |
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LOW-VACUUM GAS-DISCHARGE ELECTRON GUNS
ON THE BASIS OF HIGH-VOLTAGE GLOW DISCHARGE
V.A. Tutyk
National Metallurgy Academy of Ukraine, Dnepropetrovsk,
E-mail: tutykva@ua.fm
Investigation results of the proposed methods of rise of pressure in low-vacuum gas-discharge electron guns based
on the high voltage glow discharge with a hollow anode are presented. The influence of design parameters, cathode
material, and sort of the technological gas on working pressure is considered. The possibility of low-vacuum gas-
discharge electron guns operation in the medium and low vacuum at pressure in the range of 10-1000 Pa is proved.
PACS: 41.75.Fr; 52.80.Tn
1. INTRODUCTION
The usage of electron beams (EB) at low gas pressure
gives the opportunities to obtain coating in the medium of
reactive gas (CVD and CPVD technologies), to grow
crystals, to modify surfaces, to create plasma-chemical
technologies, to carry out active experiments in the
ionosphere etc. [1- 4]. Conventional electron guns operate
at pressures up to 10 Pa and do not allow obtaining EB
directly in low vacuum without usage of special
extracting devices. In [5] there has been proved the
possibility of EB from high-voltage glow discharge
(HGD) in the range of pressures of 1-1000 Pa. However
experimental testing has not been carried out.
The purpose of this presentation is the experimental
investigation of methods of rise of working gas pressure
in low-vacuum gas-discharge electron gun (LGEG) based
on the HGD with a hollow anode for their operation at
pressure in the range of 10-1000 Pa.
2. TECHNIQUE OF THE EXPERIMENT
Investigations were carried at the upgraded device,
described in [3, 6]. The object of the investigation was
gas-discharge electron gun EGG-6 of diode type (Fig.1).
Fig.1. General view of EGG-6:
1-high voltage insulator with inserted cold cathode;
2–hollow anode; 3–anode insert; 4–nipple for gas puffing
In the gun construction the exchangeable cathodes of
different diameters Kd , anode inserts with different
diameters of anode hole Ad , and regulated cathode-anode
gap AKL were used. Investigations were carried out in
pulsed mode. The amplitude of voltage pulse was
40U kVЈ , pulse duration was stp
510−= , repetition
frequency 100 Hz. For measuring parameters of voltage
and current pulses the signals were taken from non-
inductive resistances and input to the two-channel
oscillograph Tektronix TDS-210 with output to the
printer. The anode unit of the gun was grounded through a
small inductive coaxial shunt, which is used for discharge
current measuring. Behind the anode area EB reached the
collector. Electron beam current was registered with the
help of a shunt, which connected the collector with the
ground. The intensity of EB crossover luminescence was
measured with a photoelectric multiplier. Power
parameters of the gun and EB were measured with the
help of a calorimeter [6].
3. EXPERIMENTAL RESULTS
Investigations of LGEG allowed displaying 3
operation modes depending on design sizes of the gun,
ion path length, working pressure, and plasma discharge
location (see Table 1). At pressures P>1000 Pa in LGEG
HGD turns into diffusion discharge [7].
Working pressure rise 12 PP > at constant voltage U
results in current I increase and steepness dUdIS =
growth in volt-ampere characteristics (VAC) ( 2 1S S> ).
Therefore the problem of working pressures rise in LGEG
can be solved by decreasing of instant steepness S of
VAC at rise of P only at the expense of I decrease, as U
(power source voltage) does not depend on P. Current
value in LGEG is the function of many variables
),,,,,( AddPUfI KAγ= , where γ is coefficient of
secondary ionic-electron emission, A is sort of gas.
Expression for EB current can be written in the form:
0 0 0 0 0,a a A AK K
A AK K
I I I I I I II U P d L d A
U P d L d A
γ
γ
∂ ∂ ∂ ∂ ∂ ∂ ∂= + + + + + +
∂ ∂ ∂ ∂ ∂ ∂ ∂ (1)
where OKOAKOAaa AdLdPUI ,,,,,,, 000 γ the instantaneous
values of variables of the corresponding parameters in the
working point. If in expression (1) the partial derivations
in the first two terms increase with the pressure increase,
then the following ones can be decreased at the
appropriate choice of the corresponding parameters.
156 PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY. 2008. № 6.
Series: Plasma Physics (14), p. 156-158.
Table 1. Possible operation modes of LGEG
No
. Mechanism of
electrons origination
Ion path
length
Range of
working
pressure ,Pa
Plasma discharge
location
Operation
modes
1 ion bombardment
of cathode AKi L<λ 10-2...10 cathode-anode space pulsed
continuous
2 ion and fast atom bombardment
of cathode AKi L>λ 10...103 behind anode
space
pulsed
continuous
3 photoelectron emission AKi L<λ >103
cathode-anode and
behind anode space pulsed
(tp<10-9 s)
It gives the opportunity of working pressure rise in
LGEG by decrease of values of derivatives
/ , / , / , / , /A AK KI I d I L I d I Aγ∂ ∂ ∂ ∂ ∂ ∂ ∂ ∂ ∂ ∂ .
Typical experimental VAC of LGEG EGG-6 in
pulsed mode (Fig.2) measured for different pressures of
helium. Depicted in a double logarithm scale curves
represent inclined straight lines and are described with
the expression
mUPfI ⋅= )(
where f (P) is the function of pressure P, which shows
that for given voltage U=const pressure rise leads to
growth of current I (Fig.2).
Fig.2. Pulsed VAC for the pressure of helium
1-53 Pa, 2-106 Pa, 3 -133Pa;
dK=8 mm, dА=9 mm, LАК=1 mm
Exponent m can be connected with secondary ion-
electron emission coefficient γ . Working pressure can
be risen by means of secondary ion-electron emission
coefficient decrease. The value of γ depends on a lot of
factors, one of which is cathode material. Really it was
found that the cathode material influences the incline of
corresponding VAC, i.e. through the secondary ion-
electron emission coefficient γ determines exponent m
(see Table 2).
Table 2. Size of exponent m
Cathode
material Aluminium Low carbon
steel Graphite
m 1,4 0,93 O,43
Small value of exponent m for graphite indicates the
appropriateness of graphite usage in LGEG. However the
ability to be sprayed under ion bombing should be taken
into consideration at the final choice of cathode material.
Carried out experimental researches on the study of
influence of , ,AK A kL d d variations on VAC showed the
following results. Decrease of current I and steepness S is
observed at decreasing of cathode-anode gap AKL and
decreasing of the hole diameter in anode Ad (Fig.3).
Fig.3. Dependence of VAC steepness on cathode-anode
gap for operation in air at pressure P=39.9 Pa and
anode hole diameter: 1-dA1=11 mm, 2-dA2=8 mm
From Fig.3 it is seen that in LGEG electron beam
current decreases with LAK decrease. Value of steepness
S~LAK. The latter is connected with the fact that LAK
decrease results in growth of the electric field intensity,
sagging through the anode hole, increase of nonuniformity
of the electric field on the gun axis and reduction of
emission area of a cathode. At that current I and steepness
S decrease.
Decrease dK results in reduction of emission area of a
cathode, emitting electrons and this in its turn decreases
beam current I and steepness S. Thus the steepness is S~
4/2
Kdπ .
Fig.4. Dependence of VAC steepness on pressure P for
dA=8 mm, LAK=1 mm; 1= air, 2= helium
As researches showed for LGEG there is a strong
dependence of VAC steepness on the sort of puffing gas
157
(Fig.4). Helium He and hydrogen H2 have the lowest
value of steepness S (in particular for pressure P=399 Pa
in helium S=0.023 mA/V, whereas in air S=0.144 mA/V,
i.e. six times more). It is connected with their minimum
molecular weight so that during cathode bombardment
ions of these gases knock out less of secondary electrons,
and as a result, they give low values of coefficient γ . For
He and H2 a higher electric breakdown strength of gas gap
in the range of left branch of Paschen's curve is also
characteristic.
Revealed behaviors were laid in the base of methods
of working pressure rise in LGEG. Their integrated use
allowed creating a number of LGEG of different
functional purposes, which operates in pressure range 10-
1000Pa. In continuous mode of LGEG operation the
similar behaviors of influence , ,AK A kL d d and sort of gas
on VAC steepness were observed as in pulsed mode.
However, values of steepness S were much lower because
of limited power of an energy source.
Investigations of LGEG EGG-6 showed the
possibility of its operation in pulsed mode in working
pressure range 10-1000 Pa and accelerating voltage up to
40 kV. Maximum power of an injected electron beam in
an impulse was 59 10pusedP WЈ Ч .
4. CONCLUSIONS
Working pressure rise of gas-discharge electron guns
with a hollow anode was accomplished at the expense of
the VAC steepness decrease. Methods of working
pressure rise based on the revealed behaviors of influence
of design parameters of LGEG on VAC and on the choice
of the sort of puffing gas were proposed and
experimentally proved. As a puffing gas it is advisable to
use helium He or hydrogen H2. Complex usage of the
proposed methods has given the possibility LGEG to
operate in pulsed mode in pressure range of 10-1000 Pa.
REFERENCES
1. Z. Schiller, U. Gajzig, Z. Panzer. Electron beam
technology. M.: "Energy", 1980 (in Russian).
2. A.A.. Novikov. Radiant’s electron of a high-voltage
glow discharge with anode plasma. M.:
"Energoatomizdat", 1983 (in Russian).
3. V.A. Tutyk. Research of the mode of plasma-beam
discharge at gas-discharge electron gun operation //
Problems of Atomic Science and Technology. Ser:
“plasma Electronics and New Methods of
Acceleration” (6). 2008, N 4, p.184-188 (in Russian).
4. Yu. Ya. Ruzhin., V.N. Oraevsky., V.A. Tutyk. The
active experiments in the stratosphere with the
electron beams injection // Adv. Space Res. 1993,
v.13, N10, p. 122-124.
5. K.N. Ulyanov. Theory of the high-voltage glow
discharge // High Temperature. 1978, v.16, N 6,
p. 1121-1129 (in Russian).
6. V.A. Tutyk, M.I. Gasik. Energy parameters of the
gas-discharge electron guns for surface modification//
Electrometallurgy. 2007, N 10, p. 24-30 (in Russian).
7. A.P. Bohan., P.A. Bohan., D.E. Zakrevsky. Effective
oscillation of electron beams in the abnormal
discharge with the increased photoemission of the
cathode // Journal of Technical Physics Letters. 2003,
v. 29, N 20, p. 81-87 (in Russian).
Article received 10.10.08.
НИЗКОВАКУУМНЫЕ ГАЗОРАЗРЯДНЫЕ ЭЛЕКТРОННЫЕ ПУШКИ
НА ОСНОВЕ ВЫСОКОВОЛЬТНОГО ТЛЕЮЩЕГО РОЗРЯДА
В.А. Тутык
Приведены результаты исследования предложенных методов повышения рабочего давления в
низковакуумных газоразрядных электронных пушках, основанных на высоковольтном тлеющем разряде с
полым анодом. Экспериментально доказана возможность работы низковакуумных газоразрядных электронных
пушек при давлениях в диапазоне 10...1000 Па.
НИЗЬКОВАКУУМНІ ГАЗОРАЗРЯДНІ ЕЛЕКТРОННІ ПУШКИ
НА ОСНОВІ ВИСОКОВОЛЬНОГО ТЛІЮЧОГО РОЗРЯДУ
В.А. Тутик
Наведено результати дослідження запропонованих методів підвищення робочого в низьковакуумних
газорозрядних електронних пушках, заснованих на високовольтному тліючому розряді з порожнистим анодом.
Експериментально доведена можливість роботи низьковакуумних газорозрядних електронних пушок при
тисках у діапазоні 10...1000 Па.
158
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| id | nasplib_isofts_kiev_ua-123456789-110764 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-12-07T15:12:45Z |
| publishDate | 2008 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
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| spelling | Tutyk, V.A. 2017-01-06T11:32:57Z 2017-01-06T11:32:57Z 2008 Low-vacuum gas-discharge electron guns on the basis of high voltage glow discharge / V.A. Tutyk // Вопросы атомной науки и техники. — 2008. — № 6. — С. 156-158. — Бібліогр.: 7 назв. — англ. 1562-6016 PACS: 41.75.Fr; 52.80.Tn https://nasplib.isofts.kiev.ua/handle/123456789/110764 Investigation results of the proposed methods of rise of pressure in low-vacuum gas-discharge electron guns based on the high voltage glow discharge with a hollow anode are presented. The influence of design parameters, cathode material, and sort of the technological gas on working pressure is considered. The possibility of low-vacuum gas-discharge electron guns operation in the medium and low vacuum at pressure in the range of 10-1000 Pa is proved. Наведено результати дослідження запропонованих методів підвищення робочого в низьковакуумних газорозрядних електронних пушках, заснованих на високовольтному тліючому розряді з порожнистим анодом. Експериментально доведена можливість роботи низьковакуумних газорозрядних електронних пушок при тисках у діапазоні 10...1000 Па. Приведены результаты исследования предложенных методов повышения рабочего давления в низковакуумных газоразрядных электронных пушках, основанных на высоковольтном тлеющем разряде с полым анодом. Экспериментально доказана возможность работы низковакуумных газоразрядных электронных пушек при давлениях в диапазоне 10...1000 Па. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Plasma electronics Low-vacuum gas-discharge electron guns on the basis of high voltage glow discharge Низьковакуумні газоразрядні електронні пушки на основі високовольного тліючого розряду Низковакуумные газоразрядные электронные пушки на основе высоковольтного тлеющего розряда Article published earlier |
| spellingShingle | Low-vacuum gas-discharge electron guns on the basis of high voltage glow discharge Tutyk, V.A. Plasma electronics |
| title | Low-vacuum gas-discharge electron guns on the basis of high voltage glow discharge |
| title_alt | Низьковакуумні газоразрядні електронні пушки на основі високовольного тліючого розряду Низковакуумные газоразрядные электронные пушки на основе высоковольтного тлеющего розряда |
| title_full | Low-vacuum gas-discharge electron guns on the basis of high voltage glow discharge |
| title_fullStr | Low-vacuum gas-discharge electron guns on the basis of high voltage glow discharge |
| title_full_unstemmed | Low-vacuum gas-discharge electron guns on the basis of high voltage glow discharge |
| title_short | Low-vacuum gas-discharge electron guns on the basis of high voltage glow discharge |
| title_sort | low-vacuum gas-discharge electron guns on the basis of high voltage glow discharge |
| topic | Plasma electronics |
| topic_facet | Plasma electronics |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/110764 |
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