Effect of electron emission on radio-frequency plasma sheaths
In this article it is studied the influence of electron emission on sheath parameters near electrodes in radio-frequency discharges with the magnetic field. We considered the one-dimensional radio-frequency discharge in argon between plane electrodes separated by a gap d at various neutral gas press...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2008 |
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2008
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/110795 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Effect of electron emission on radio-frequency plasma sheaths / O.Yu. Kravchenko, G.I. Levada, I.S. Marushchak, A.V. Vakulenko // Вопросы атомной науки и техники. — 2008. — № 6. — С. 104-106. — Бібліогр.: 8 назв. — англ. |