Effect of electron emission on radio-frequency plasma sheaths

• Published in: Вопросы атомной науки и техники
• Date: 2008
• Main Authors: Kravchenko, O.Yu., Levada, G.I., Marushchak, I.S., Vakulenko, A.V.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2008
• Subjects: Plasma dynamics and plasma wall interaction
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/110795
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Effect of electron emission on radio-frequency plasma sheaths / O.Yu. Kravchenko, G.I. Levada, I.S. Marushchak, A.V. Vakulenko // Вопросы атомной науки и техники. — 2008. — № 6. — С. 104-106. — Бібліогр.: 8 назв. — англ.

In this article it is studied the influence of electron emission on sheath parameters near electrodes in radio-frequency discharges with the magnetic field. We considered the one-dimensional radio-frequency discharge in argon between plane electrodes separated by a gap d at various neutral gas press...