The investigation of the optical spectra in process of magnetron deposition

• Published in: Вопросы атомной науки и техники
• Date: 2008
• Main Authors: Demchishin, A.V., Evsyukov, A.N., Goncharov, A.A., Kostin, E.G.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2008
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/111035
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: The investigation of the optical spectra in process of magnetron deposition / A.V. Demchishin, A.N. Evsyukov, A.A. Goncharov, E.G. Kostin // Вопросы атомной науки и техники. — 2008. — № 6. — С. 195-197. — Бібліогр.: 6 назв. — англ.

We describe the state-of-the-art method of monitoring optical parameters the cylindrical gas discharge plasma of magnetron type. An analysis and characterization of the spectrum during a process of titanium nitride deposition is carried out. The optimum conditions of titanium nitride synthesis on su...