Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming

Parasitic components of lens field are ones of the main parameters that determine spatial resolution of the MeV energy ion microprobe based on parameter multiplet of the magnetic quadrupole lenses. The parameter set of probe-forming systems was examined, the maximum permissible parasitic components...

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Veröffentlicht in:Вопросы атомной науки и техники
Datum:2003
Hauptverfasser: Melnik, K.I., Ponomarev, A.G.
Format: Artikel
Sprache:English
Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2003
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Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/111225
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming / K.I. Melnik, A.G. Ponomarev // Вопросы атомной науки и техники. — 2003. — № 4. — С. 301-304. — Бібліогр.: 6 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
id nasplib_isofts_kiev_ua-123456789-111225
record_format dspace
spelling Melnik, K.I.
Ponomarev, A.G.
2017-01-08T19:29:39Z
2017-01-08T19:29:39Z
2003
Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming / K.I. Melnik, A.G. Ponomarev // Вопросы атомной науки и техники. — 2003. — № 4. — С. 301-304. — Бібліогр.: 6 назв. — англ.
1562-6016
https://nasplib.isofts.kiev.ua/handle/123456789/111225
539.1.078
Parasitic components of lens field are ones of the main parameters that determine spatial resolution of the MeV energy ion microprobe based on parameter multiplet of the magnetic quadrupole lenses. The parameter set of probe-forming systems was examined, the maximum permissible parasitic components of the lens field were computed, technological limitations on pole tips positioning accuracy were determined such that aberrations caused by them did not result in substantial beam degradation. Influence of the field parasitic components on ion-optical properties of multiplets was estimated, and computation technique was presented.
en
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
Вопросы атомной науки и техники
Приложения и технологии
Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming
Article
published earlier
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
title Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming
spellingShingle Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming
Melnik, K.I.
Ponomarev, A.G.
Приложения и технологии
title_short Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming
title_full Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming
title_fullStr Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming
title_full_unstemmed Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming
title_sort permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming
author Melnik, K.I.
Ponomarev, A.G.
author_facet Melnik, K.I.
Ponomarev, A.G.
topic Приложения и технологии
topic_facet Приложения и технологии
publishDate 2003
language English
container_title Вопросы атомной науки и техники
publisher Національний науковий центр «Харківський фізико-технічний інститут» НАН України
format Article
description Parasitic components of lens field are ones of the main parameters that determine spatial resolution of the MeV energy ion microprobe based on parameter multiplet of the magnetic quadrupole lenses. The parameter set of probe-forming systems was examined, the maximum permissible parasitic components of the lens field were computed, technological limitations on pole tips positioning accuracy were determined such that aberrations caused by them did not result in substantial beam degradation. Influence of the field parasitic components on ion-optical properties of multiplets was estimated, and computation technique was presented.
issn 1562-6016
url https://nasplib.isofts.kiev.ua/handle/123456789/111225
citation_txt Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming / K.I. Melnik, A.G. Ponomarev // Вопросы атомной науки и техники. — 2003. — № 4. — С. 301-304. — Бібліогр.: 6 назв. — англ.
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first_indexed 2025-12-02T05:31:22Z
last_indexed 2025-12-02T05:31:22Z
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