Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming

Parasitic components of lens field are ones of the main parameters that determine spatial resolution of the MeV energy ion microprobe based on parameter multiplet of the magnetic quadrupole lenses. The parameter set of probe-forming systems was examined, the maximum permissible parasitic components...

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Published in:Вопросы атомной науки и техники
Date:2003
Main Authors: Melnik, K.I., Ponomarev, A.G.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2003
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Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/111225
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming / K.I. Melnik, A.G. Ponomarev // Вопросы атомной науки и техники. — 2003. — № 4. — С. 301-304. — Бібліогр.: 6 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
_version_ 1862656894148018176
author Melnik, K.I.
Ponomarev, A.G.
author_facet Melnik, K.I.
Ponomarev, A.G.
citation_txt Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming / K.I. Melnik, A.G. Ponomarev // Вопросы атомной науки и техники. — 2003. — № 4. — С. 301-304. — Бібліогр.: 6 назв. — англ.
collection DSpace DC
container_title Вопросы атомной науки и техники
description Parasitic components of lens field are ones of the main parameters that determine spatial resolution of the MeV energy ion microprobe based on parameter multiplet of the magnetic quadrupole lenses. The parameter set of probe-forming systems was examined, the maximum permissible parasitic components of the lens field were computed, technological limitations on pole tips positioning accuracy were determined such that aberrations caused by them did not result in substantial beam degradation. Influence of the field parasitic components on ion-optical properties of multiplets was estimated, and computation technique was presented.
first_indexed 2025-12-02T05:31:22Z
format Article
fulltext
id nasplib_isofts_kiev_ua-123456789-111225
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
issn 1562-6016
language English
last_indexed 2025-12-02T05:31:22Z
publishDate 2003
publisher Національний науковий центр «Харківський фізико-технічний інститут» НАН України
record_format dspace
spelling Melnik, K.I.
Ponomarev, A.G.
2017-01-08T19:29:39Z
2017-01-08T19:29:39Z
2003
Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming / K.I. Melnik, A.G. Ponomarev // Вопросы атомной науки и техники. — 2003. — № 4. — С. 301-304. — Бібліогр.: 6 назв. — англ.
1562-6016
https://nasplib.isofts.kiev.ua/handle/123456789/111225
539.1.078
Parasitic components of lens field are ones of the main parameters that determine spatial resolution of the MeV energy ion microprobe based on parameter multiplet of the magnetic quadrupole lenses. The parameter set of probe-forming systems was examined, the maximum permissible parasitic components of the lens field were computed, technological limitations on pole tips positioning accuracy were determined such that aberrations caused by them did not result in substantial beam degradation. Influence of the field parasitic components on ion-optical properties of multiplets was estimated, and computation technique was presented.
en
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
Вопросы атомной науки и техники
Приложения и технологии
Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming
Article
published earlier
spellingShingle Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming
Melnik, K.I.
Ponomarev, A.G.
Приложения и технологии
title Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming
title_full Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming
title_fullStr Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming
title_full_unstemmed Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming
title_short Permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming
title_sort permissible technological limitations of quadrupole lenses used in parameter multiplets for ion microprobe forming
topic Приложения и технологии
topic_facet Приложения и технологии
url https://nasplib.isofts.kiev.ua/handle/123456789/111225
work_keys_str_mv AT melnikki permissibletechnologicallimitationsofquadrupolelensesusedinparametermultipletsforionmicroprobeforming
AT ponomarevag permissibletechnologicallimitationsofquadrupolelensesusedinparametermultipletsforionmicroprobeforming