Composition adjustment of vacuum-arc Ti-Al-N films, deposited with use of two-channel filter

• Veröffentlicht in: Вопросы атомной науки и техники
• Datum: 2011
• Hauptverfasser: Aksyonov, D.S., Aksenov, I.I., Luchaninov, A.A., Reshetnyak, E.N., Strel’nitskij, V.E.
• Format: Artikel
• Sprache: English
• Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2011
• Schlagworte: Физика радиационных и ионно-плазменных технологий
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/111438
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Composition adjustment of vacuum-arc Ti-Al-N films, deposited with use of two-channel filter / D.S. Aksyonov, I.I. Aksenov, A.A. Luchaninov, E.N. Reshetnyak, V.E. Strel’nitskij // Вопросы атомной науки и техники. — 2011. — № 4. — С. 140-144. — Бібліогр.: 10 назв. — англ.

Composite films were formed by vacuum-arc method using two plasma sources equipped with aluminum and titanium cathodes. The sources were coupled with a dual channel T-shaped magnetic filter. Ability of Ti-Al-N films composition adjustment by deposition of mixed plasma streams from the plasma sources...