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Plasma streams mixing in two-channel T-shaped magnetic filter

Ti-Al-N films were deposited by vacuum arc method. T-shaped magnetic filter with two channels was used for films preparation. Deposition was performed after aluminum and titanium separate plasma streams from two plasma sources were mixed into single one inside plasma duct having weakened magnetic fi...

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Veröffentlicht in:	Вопросы атомной науки и техники
Datum:	2011
Hauptverfasser:	Aksyonov, D.S., Aksenov, I.I., Luchaninov, A.A., Reshetnyak, E.N., Strel’nitskij, V.E.
Format:	Artikel
Sprache:	Englisch
Veröffentlicht:	Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2011
Schlagworte:	Физика и технология конструкционных материалов
Online Zugang:	https://nasplib.isofts.kiev.ua/handle/123456789/111691
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:	Plasma streams mixing in two-channel T-shaped magnetic filter / D.S. Aksyonov, I.I. Aksenov, A.A. Luchaninov, E.N. Reshetnyak, V.E. Strel’nitskij // Вопросы атомной науки и техники. — 2011. — № 6. — С. 116-120. — Бібліогр.: 9 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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