Plasma streams mixing in two-channel T-shaped magnetic filter

• Veröffentlicht in: Вопросы атомной науки и техники
• Datum: 2011
• Hauptverfasser: Aksyonov, D.S., Aksenov, I.I., Luchaninov, A.A., Reshetnyak, E.N., Strel’nitskij, V.E.
• Format: Artikel
• Sprache: English
• Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2011
• Schlagworte: Физика и технология конструкционных материалов
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/111691
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Plasma streams mixing in two-channel T-shaped magnetic filter / D.S. Aksyonov, I.I. Aksenov, A.A. Luchaninov, E.N. Reshetnyak, V.E. Strel’nitskij // Вопросы атомной науки и техники. — 2011. — № 6. — С. 116-120. — Бібліогр.: 9 назв. — англ.

Ti-Al-N films were deposited by vacuum arc method. T-shaped magnetic filter with two channels was used for films preparation. Deposition was performed after aluminum and titanium separate plasma streams from two plasma sources were mixed into single one inside plasma duct having weakened magnetic fi...