Deposition of W and W-RE alloys by gas-phase and plasma chemical methods

• Published in: Вопросы атомной науки и техники
• Date: 2016
• Main Authors: Glushko, P.I., Yevsiukov, A.I., Ghuravlyov, А.Yu., Hovanskiy, N.А., Khizhnyak, D.A., Shirokov, B.M., Shijan, А.V.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2016
• Subjects: Физика и технология конструкционных материалов
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/111748
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Deposition of W and W-RE alloys by gas-phase and plasma chemical methods / P.I. Glushko, A.I. Yevsiukov, А.Yu. Ghuravlyov, N.А. Hovanskiy, D.A. Khizhnyak, B.M. Shirokov, А.V. Shijan // Вопросы атомной науки и техники. — 2016. — № 1. — С. 108-111. — Бібліогр.: 2 назв. — англ.

A thermodynamic analysis of the temperature dependence of the isobaric-isothermal potential processes of rhenium, tungsten and their compositions from a mixture of a metal fluorides with molecular and atomic hydrogen is provided. The dependence of the deposition rate of tungsten and tungsten-rhenium...