Intrinsic stress formation in multi-component coatings produced by plasma ion deposition in modes of DC and pulse bias potentials

• Published in: Вопросы атомной науки и техники
• Date: 2016
• Main Authors: Kalinichenko, A.I., Kozionov, S.A., Strelnitskij, V.E.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2016
• Subjects: Физика и технология конструкционных материалов
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/111764
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Intrinsic stress formation in multi-component coatings produced by plasma ion deposition in modes of DC and pulse bias potentials / A.I. Kalinichenko, S.A. Kozionov, V.E. Strelnitskij // Вопросы атомной науки и техники. — 2016. — № 1. — С. 149-153. — Бібліогр.: 11 назв. — англ.

In the model of nonlocal thermoelastic peak of low-energy ion a formula for intrinsic stress in multi-component material deposited from mixed beam of differently charged ions in modes of DC and pulse bias potentials is derived. Calculation of intrinsic stress σ depending on bias potential U in coati...