Intrinsic stress formation in multi-component coatings produced by plasma ion deposition in modes of DC and pulse bias potentials
In the model of nonlocal thermoelastic peak of low-energy ion a formula for intrinsic stress in multi-component material deposited from mixed beam of differently charged ions in modes of DC and pulse bias potentials is derived. Calculation of intrinsic stress σ depending on bias potential U in coati...
Saved in:
| Published in: | Вопросы атомной науки и техники |
|---|---|
| Date: | 2016 |
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2016
|
| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/111764 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Intrinsic stress formation in multi-component coatings produced by plasma ion deposition in modes of DC and pulse bias potentials / A.I. Kalinichenko, S.A. Kozionov, V.E. Strelnitskij // Вопросы атомной науки и техники. — 2016. — № 1. — С. 149-153. — Бібліогр.: 11 назв. — англ. |