Structure and properties of W, Ta and W-Ta coatings deposited with the use of a gas-plasma source

W, Ta and W-Ta coatings were deposited by argon ion sputtering of targets made from appropriate metals using the gas plasma source. Mechanical properties of the obtained coatings were investigated by the methods of X-ray fluorescence analysis, scanning electron microscopy, X-ray diffraction analysis...

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Published in:Вопросы атомной науки и техники
Date:2016
Main Authors: Lunyov, V.M., Kuprin, A.S., Ovcharenko, V.D., Belous, V.A., Morozov, A.N., Ilchenko, A.V., Tolmachova, G.N., Reshetnyak, E.N., Vasilenko, R.L.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2016
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Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/111766
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Structure and properties of W, Ta and W-Ta coatings deposited with the use of a gas-plasma source / V.M. Lunyov, A.S. Kuprin, V.D. Ovcharenko, V.A. Belous, A.N. Morozov, A.V. Ilchenko, G.N. Tolmachova, E.N. Reshetnyak, R.L. Vasilenko // Вопросы атомной науки и техники. — 2016. — № 1. — С. 140-144. — Бібліогр.: 21 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine