Structure and properties of W, Ta and W-Ta coatings deposited with the use of a gas-plasma source
W, Ta and W-Ta coatings were deposited by argon ion sputtering of targets made from appropriate metals using the gas plasma source. Mechanical properties of the obtained coatings were investigated by the methods of X-ray fluorescence analysis, scanning electron microscopy, X-ray diffraction analysis...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2016 |
| Main Authors: | , , , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2016
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/111766 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Structure and properties of W, Ta and W-Ta coatings deposited with the use of a gas-plasma source / V.M. Lunyov, A.S. Kuprin, V.D. Ovcharenko, V.A. Belous, A.N. Morozov, A.V. Ilchenko, G.N. Tolmachova, E.N. Reshetnyak, R.L. Vasilenko // Вопросы атомной науки и техники. — 2016. — № 1. — С. 140-144. — Бібліогр.: 21 назв. — англ. |