Influence of pressure of working atmosphere on the formation of phase-structural state and physical and mechanical properties of vacuum-arc multilayer coatings ZrN/CrN

• Published in: Вопросы атомной науки и техники
• Date: 2016
• ISSN: 1562-6016
• Main Authors: Sobol, O.V., Andreev, A.A., Gorban, V.F., Stolbovoy, V.A., Meylekhov, A.A., Postelnyk, A.A., Dolomanov, A.V.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2016
• Subjects: Физика и технология конструкционных материалов
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/111771
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Influence of pressure of working atmosphere on the formation of phase-structural state and physical and mechanical properties of vacuum-arc multilayer coatings ZrN/CrN / O.V. Sobol, A.A. Andreev, V.F. Gorban, V.A. Stolbovoy, A.A. Meylekhov, A.A. Postelnyk, A.V. Dolomanov // Вопросы атомной науки и техники. — 2016. — № 1. — С. 134-139. — Бібліогр.: 40 назв. — англ.

For multilayer coating system ZrN/CrN determined the effect of the pressure of the working atmosphere of nitrogen (PN), DC (-Us) and pulse (-Ui) negative bias potential during the deposition and the thickness of the layers in the period on the phase composition, texture, substructural characteristic...