Gas-Phase Synthesis of Film Structures of Ni—N System

• Published in: Металлофизика и новейшие технологии
• Date: 2015
• Main Author: Shalaev, R.V.
• Format: Article
• Language: English
• Published: Інститут металофізики ім. Г.В. Курдюмова НАН України 2015
• Subjects: Металлические поверхности и плёнки
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/111892
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Gas-Phase Synthesis of Film Structures of Ni—N System / R. V. Shalaev // Металлофизика и новейшие технологии. — 2015. — Т. 37, № 4. — С. 509-519. — Бібліогр.: 12 назв. — рос.

As shown, the magnetron sputtering is effective for the synthesis of various nanostructured phases of nickel nitride (solid solution of nitrogen in nickel, Ni₄N, Ni₃N, and Ni₂N). The regularities of formation of globular or nanocolumnar film structures are determined, depending on the concentration...