Formation of Nanostructured Relief of TiN—Fe Heterostructures in Hybrid Helicon-Arc Plasma Reactor

• Published in: Металлофизика и новейшие технологии
• Date: 2015
• Main Authors: Rudenko, E.M., Korotash, I.V., Polotskiy, D.Y., Osipov, L.S., Dyakin, M.V., Prikhna, T.A., Shapovalov, A.P.
• Format: Article
• Language: English
• Published: Інститут металофізики ім. Г.В. Курдюмова НАН України 2015
• Subjects: Металлические поверхности и плёнки
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/111893
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Formation of Nanostructured Relief of TiN—Fe Heterostructures in Hybrid Helicon-Arc Plasma Reactor / E. M. Rudenko, I. V. Korotash, D. Y. Polotskiy, L. S. Osipov, M. V. Dyakin, T. A. Prikhna, A. P. Shapovalov // Металлофизика и новейшие технологии. — 2015. — Т. 37, № 4. — С. 499-508. — Бібліогр.: 8 назв. — рос.

The features of the physical mechanisms of controlled ion-plasma formation of the new functional nanomaterials are investigated. The technological regimes of formation of functional nanostructured materials under combined impact of several plasma sources are investigated; the structural and electric...