Hollow cathode discharge in low pressure oxygen: transient mode
Glow characteristics of the discharge with cylindrical hollow cathode at oxygen pressure in a range of 0.015…0.09 Torr are determined. Dependencies of radial electric field in the plasma on the discharge parameters are defined, and particular fact of creation at pressure higher than ~ 0.06 Torr the...
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
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| Цитувати: | Hollow cathode discharge in low pressure oxygen: transient mode / V.Yu. Bazhenov, S.V. Matsevich, V.M. Piun, V.V. Tsiolko // Вопросы атомной науки и техники. — 2015. — № 4. — С. 177-180. — Бібліогр.: 18 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1859732586212884480 |
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| author | Bazhenov, V.Yu. Matsevich, S.V. Piun, V.M. Tsiolko, V.V. |
| author_facet | Bazhenov, V.Yu. Matsevich, S.V. Piun, V.M. Tsiolko, V.V. |
| citation_txt | Hollow cathode discharge in low pressure oxygen: transient mode / V.Yu. Bazhenov, S.V. Matsevich, V.M. Piun, V.V. Tsiolko // Вопросы атомной науки и техники. — 2015. — № 4. — С. 177-180. — Бібліогр.: 18 назв. — англ. |
| collection | DSpace DC |
| container_title | Вопросы атомной науки и техники |
| description | Glow characteristics of the discharge with cylindrical hollow cathode at oxygen pressure in a range of 0.015…0.09 Torr are determined. Dependencies of radial electric field in the plasma on the discharge parameters are defined, and particular fact of creation at pressure higher than ~ 0.06 Torr the potential barrier at the boundary between negative glow plasma and cathode layer, which limits ion escaping to the cathode. As well, limits of the discharge glow characteristics are determined, which result in appearance of the hollow cathode effect.
Встановлено характеристики горіння розряду з циліндричним порожнистим катодом при тисках кисню 0,015…0,09 Торр. Знайдено залежності радіального електричного поля в плазмі від параметрів розряду, зокрема, встановлено факт утворення при тисках більше ~ 0,06 Торр потенціального бар’єру на границі між плазмою негативного світіння та катодним шаром, який обмежує вихід іонів на катод. Також встановлено граничні характеристики горіння розряду, при яких починає проявлятися ефект порожнистого катодa.
Установлены характеристики горения разряда с цилиндрическим полым катодом при давлениях кислорода 0,015…0,09 Торр. Найдены зависимости радиального электрического поля в плазме от параметров разряда, в частности, установлен факт образования при давлениях больше ~ 0,06 Торр потенциального барьера на границе между плазмой отрицательного свечения и катодным слоем, ограничивающего уход ионов на катод. Также установлены граничные ха-рактеристики горения разряда, при которых начинает проявляться эффект полого катода.
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ISSN 1562-6016. ВАНТ. 2015. №4(98) 177
HOLLOW CATHODE DISCHARGE IN LOW PRESSURE OXYGEN:
TRANSIENT MODE
V.Yu. Bazhenov, S.V. Matsevich, V.M. Piun, V.V. Tsiolko
Institute of Physics NASU, Kiev, Ukraine
E-mail: matsevich@gmail .com
Glow characteristics of the discharge with cylindrical hollow cathode at oxygen pressure in a range of
0.015…0.09 Torr are determined. Dependencies of radial electric field in the plasma on the discharge parameters are
defined, and particular fact of creation at pressure higher than ~ 0.06 Torr the potential barrier at the boundary be-
tween negative glow plasma and cathode layer, which limits ion escaping to the cathode. As well, limits of the dis-
charge glow characteristics are determined, which result in appearance of the hollow cathode effect.
PACS: 52.80.-s, 52.25.Ya
INTRODUCTION
Hollow cathode discharge phenomenon was described
in scientific literature yet in 1916 by Paschen at the
studies of helium emission spectra – substitution of flat
cathode by hollow cylinder shaped one resulted in es-
sential growth of the discharge current under the same
discharge voltage [1]. In subsequent decades hollow
cathode discharge (HCD) was widely used in atomic
absorption and emission spectroscopy [2] due to its abil-
ity to generate intense ligh emission in wavelength
range fom vacuum ultraviolet till near infrared. Later,
along with other discharge types, HCD found its usage
in plasma-technological applications [3], particularly, for
low temperature deposition of hydrogenated amorphous
silicon material, a-Si:H [4], for modification of the sur-
face of Ti implants by the production of rough surfaces
that consist of a mixture of Ti-oxides [5] and so on.
It should be noted at once that in the literature (e.g.
see [6]) all hollow cathode discharge appearances are
conditionally subdivided into three types: glow, high
voltage, and arc ones. Everyone oh those discharge pos-
sesses its own peculiarities. In the following, only glow
discharge type will be considered.
The most common criterion of hollow cathode dis-
charge is a requirement that transverse dimension of the
cathode cavity should be comparable with those of the
discharge cathode regions, such as cathode layer and
glow plasma ([6], p. 6). When cathode transverse di-
mension is considerably less than those of the discharge
cathode regions, fast electrons accelerated in the cath-
ode layer can undergo essential number of oscillations
in the negative glow plasma before spending practically
total their energy for gas ionization and excitation, and
their coming to the discharge anode due scattering at the
gas atoms/molecules. With the use of cylindrical cath-
ode shape, plasma density at the cathode axis also in-
creases due to “ballistic” focusing of fast electrons.
The literature devoted to study of hollow cathode
discharges is rather extensive (e.g. see [6 - 12] and ref-
erences therein). However, practically all researches
were accomplished with the use of noble gases as work-
ing media. Usage of molecular gases, particularly, elec-
tronegative ones, was a rare event [13, 14], although it
is known that negative ions essentially influence the
plasma features. Besides, the researches were usually
performed at high enough pressure values (a couple of
Torr and above) using hollow cathodes of small radius
(several millimeters). These circumstances limited pos-
sibilities of correct determining plasma parameters in
such discharge. Particularly, it regards determining the
cathode layer thickness (that is, the discharge region
with high electric field strength). Usually, it was as-
sumed that the cathode layer boundary coincides with
one between the dark space and the negative glow. It is
not totally correct, since the negative glow consists of
two parts: one of those fills a portion of the cathode
layer, whereas another one belongs to the plasma (plas-
ma part of the negative glow) [15, 16].
As it was already noted above, the hollow cathode
effect occurs when the hollow cathode transverse di-
mension is less than the discharge glow length. In the
opposite case, the discharge behavior is practically iden-
tical to usual short (that is, without positive column)
discharge with flat cathode.
Purpose of the present work is the study of peculiari-
ties of hollow cathode discharge with large dimensions
(tens centimeters) at oxygen pressure lower than
0.1 Torr, particularly, those regarding the discharge
transition from flat cathode operation mode to that with
realization of the hollow cathode effect.
1. EXPERIMENT SET-UP
AND MEASUREMENTS
The discharge hollow cathode was elaborated from
stainless steel and had the following dimensions: 38 cm
diameter and 42 cm length (the cathode simultaneously
served as vacuum chamber). The discharge made of
copper having 30.5 cm diameter was located near back
side of the cathode/chamber. From another side, the
cathode cavity was closed by a door with transparent
window having 280 mm diameter. An advantage of
copper anode was the fact that the resistance value of
oxide layer formed at the anode surface during its op-
eration in oxygen had practically no effect on the plas-
ma parameters. Use of the anode with large dimension
(comparable with the cathode diameter) enabled obtain-
ing high longitudinal uniformity of the plasma. With
such anode, longitudinal uniformity of the plasma densi-
ty inside the cathode (excluding the regions of about
3…4 cm thickness near the anode and the door) was not
worse than ±20%.
The discharge power supply was provided by DC
source with controlled voltage and current values in
ranges of 400…800 V and 100…600 mA, respectively.
The cathode/chamber was grounded, and positive poten-
tial was applied to the anode. Power Wd introduced in
the discharge could be varied in range of 50…350 W
ISSN 1562-6016. ВАНТ. 2015. №4(98) 178
which corresponded to specific power in the discharge
Ws ≈ 1…7 mW/cm3.
Cathode was evacuated down to pressure of about
~ 10-5
Torr, and after that working gas was supplied to
the chamber until reaching of predetermined pressure
value. Working gas pressure P of oxygen in the cathode
was varied in range of 10-2…2⋅10-1 Torr.
The electric field in the plasma was measured using
double Langmuir probes, which could be moved along
and across the cathode. The probes were made of two
parallel 0.75 mm diameter wires having 10 mm length
located at 10 mm distance from each other. To avoid the
effect of contamination of the probes surface on the
electric field value, the probes after each measurement
were cleaned by means of ion current from the plasma
(for that purpose, the probes were grounded for
5…10 s).
2. EXPERIMENTAL RESULTS
AND DISCUSSION
For correct determining the cathode layer thickness,
measurements of radial distributions of electric field
strength ER in the plasma were performed at the dis-
charge power values Wd of 100 and 250 W, and oxygen
pressure values P = 0.015, 0.3, 0.6 and 0.9 Torr. Fig. 1
presents the results of ER measurements, as well as cal-
culated on a basis of these values radial potential fall UR
in the plasma at Wd = 100 W and four values of O2
pressure. The values of potential UR were normalized so
that they should coincide at the system axis. One can
see from Fig.1,a that at all P values the dependence of
ER on R possesses non-monotonous behavior – at first,
it grows until a maximum with radius increase, after that
it decreases, and after reaching a minimum it grows up
again (the last ER growth corresponds to the region of
cathode fall of the potential). Oxygen pressure increase
results not only in decrease of electric field value ER in
the plasma, but as well in a shift of ER minimum posi-
tion towards the cathode surface. At that, with the pres-
sure variation from 0.03 to 0.06 Torr, position of the
minimum changes in a jump-like manner from ~ 12 to
~ 16 cm. Besides, at oxygen pressure values of 0.06 and
0.09 Torr the field ER in a region of the minimum exhib-
its double change of its sign – at first, it becomes nega-
tive, and in subsequent it changes to positive again. It is
an evidence of formation of potential barrier in this re-
gion, which prevents coming of the ions, originated in
the negative glow plasma, to the cathode.
The discharge power increase up to 250 W could
lead just to increase of ER and U absolute values, with-
out principal change of the overall behavior.
A point of crossing the tangents to U vs R profile
was taken as the cathode layer boundary. It was as-
sumed that electric field in the cathode layer possesed
linear dependence on R:
>
<−−
=
dR
dRdRoE
RER ,0
),/1(
)(
that is E ≈ Ud/d, where Ud is the discharge voltage, d is
the cathode layer thickness (influence of potential fall at
the discharge plasma and anode potential fall could be
neglected in our case due to their small values).
0 4 8 12 16 20
0,0
0,1
0,2
0,3
0,4
10
20 a
Ca
th
od
eE R,
V/
cm
R, cm
0.015 Torr
0.03 Torr
0.06 Torr
0.09 Torr
0 4 8 12 16 20
-1,6
-1,2
-0,8
-0,4
0,0
Ca
th
od
e
b
U R,
V
R, cm
0.09 Torr
0.06 Torr
0.03 Torr
0.015 Torr
Fig. 1. Radial dependencies of radial component ER
of electric field in the plasma (a) and potential U (b)
at different oxygen pressure values. Wd = 100 W
Dependence of the discharge voltage Ud on reduced
discharge current density Jd/P2 (reduced CVC of the
discharge) is presented in Fig. 2.
50 100 150 200 250 300 350
400
500
600
700
0 100 200 300
0,0
2,0x104
4,0x104
6,0x104
E
R
/P
,
V
/(
cm
T
o
rr
)
Jd/P
2, mA/(cm Torr)2
U d,
V
Jd/P
2, mA/(cm Torr)2
Fig. 2. Reduced CVC of the discharge at oxygen
pressure variation in a range of 0.015…0.09 Torr,
and Wd values of 100 and 250 W. An insert shows
reduced electric field ER/P dependence
on Jd/P2 obtained under the same conditions
One can see from the figure that at Jd/P2
~ 30…40 mA/(cm·Torr)2 this dependence exhibits a
bend – rapid Ud growth is substituted by its slower in-
crease. (It should be noted that Jd/P2 grows up with the
pressure decrease, so that the left part of the curve (before
the bend) corresponds to oxygen pressure values
~ 0.09…0.06 Torr). Thus, the pressure decrease below
0.06 Torr results in a change of the discharge glow mode.
Dependence of reduced cathode layer thickness Pd
on Jd/P2 (Fig. 3) possesses the same peculiarity – abrupt
decrease of Pd at Jd/P2 ~ 30…40 mA/(cm·Torr)2.
ISSN 1562-6016. ВАНТ. 2015. №4(98) 179
0 50 100 150 200 250 300 350
0,00
0,03
0,06
0,09
0,12
0,15
0,18
Pd ~ (Jd/P
2)-0.32
Pd
, T
or
r c
m
Jd/P
2, mA/(cm Torr)2
Fig. 3. Dependence of reduced cathode layer thickness
Pd on Jd/P2 in oxygen plasma at pressure variation from
0.015 to 0.09 Torr, and Wd value of 100 and 250 W
For understanding what is going on in the discharge
at oxygen pressure decrease below ~ 0.06 Torr, let us
consider, how a run path of fast electrons Λf, which de-
fines a length of the negative glow plasma [15] filling
the cathode cavity, changes with the pressure variation.
Authors of [16] for an estimation of Λf value have pro-
posed empiric formula
,/)( pBUU ddf ≈Λ (1)
where B is a constant in empiric Townsend formula for
ionization coefficient
)/exp(/ EBpAp −=α . (2)
The authors motivate a correctness of such estimation
by fact that in electron energy range of interest for us
(~ 10…1000 eV) the dependencies of a majority of exci-
tation and ionization cross sections possess very shallow
maxima. Λf value obtained from (1) is in a good enough
agreement with experimentally measured negative glow
dimensions for nitrogen (Fig. 2 in [16]). However, table
data for B in the case of large electric field values
(>103 V/(cm·Torr)) are absent in the literature, while as
one can see from Fig. 2, in our case reduced electric field
ER/P in the cathode layer exceeds V/(cm·Torr). Due to
that, constant B value was estimated by us on a basis of
experimentally measured dependence of ionization co-
efficient α/P for oxygen on reduced field E/P [17]. In
variation range E/P ~ 103…104 V/(cm·Torr) В value
was about 260…280 V/(cm·Torr). Estimations of elec-
tron run path Λf in our oxygen plasma are presented in
Fig. 4. Unfortunately, reliable data on differential cross
section of elastic scattering of electrons with energy up
to ~ 103 eV are practically absent, and as a result, in
many papers it is assumed that scattering of electrons
with energy up to ~ 50 eV occurs only in forward direc-
tion. Due to that, in our estimations we also followed
from this assumption. One can see from the figure that at
oxygen pressure of 0.09 Torr the run path Λf is about
15…20 cm, which is close to the cathode radius R. Pres-
sure decrease down to 0.03 Torr leads to Λf increase al-
ready to ~ 50…60 cm, which corresponds to about 1.5 R.
Let us consider a relation between the behavior of
radial distribution of the plasma density Ne at different
oxygen pressure values and estimated by us run path Λf
values. For that that purpose we’ll use experimental data
obtained in [18] with the same cathode dimensions and
discharge parameters − power Wd = 250 W, and oxygen
pressure values P = 0.09 and 0.03 Torr.
400 500 600 700 800
101
102
0,015 Torr
0.06 Torr
0.03 Torr
0.09 Torr
Λ f
, c
m
Ud, V
Fig. 4. Dependence of the run path of fast electrons Λf
on voltage Ud for different oxygen pressure values
Fig. 5 exhibits experimental dependencies of radial
distributions of the plasma density Ne obtained in [18]
and schematic trajectories of fast electron motion inside
the cathode cavity (length of the arrows corresponds to
estimated run path Λf values).
-20 -16 -12 -8 -4 0 4 8 12 16 20
1E9
1E10
Λf
Λf
a)
N e,
cm
-3
R, cm
-20 -16 -12 -8 -4 0 4 8 12 16 20
1E9
1E10
Λf
Λf
b)
N e,
cm
-3
R, cm
Fig. 5. Radial distributions of oxygen plasma density Ne
(-•-) at P = 0.09 Torr (a) and 0.03 Torr (b);
Wd = 250 W [18]. Arrows indicate trajectories of fast
electron motion inside the cathode cavity
One can see from Fig. 5 that at 0.09 Torr pressure
the plasma density distribution has double-humped
shape with a minimum at the cathode axis. It is due to
fact that fast electrons accelerated in the cathode layer
spend their whole energy without reaching the chamber
axis. Since in that case an “overlapping” of negative
glow plasmas does not occur, our discharge should be
considered as a version of the discharge with flat cath-
ode. Completely different behavior is observed at gas
pressure decrease down to 0.03 Torr. The run path Λf is
at that long enough, which enables fast electrons to
cross the cathode cavity along its diameter, reflect from
the cathode layer and subsequently return to the system
axis. That is, an “overlapping” of negative glow plasma
ISSN 1562-6016. ВАНТ. 2015. №4(98) 180
occurs, and fast electrons perform ionization not just in
“their own plasma” (that is, in plasma where they start-
ed their path), but as well in the whole volume of the
cathode cavity. It results in both abrupt increase of the
plasma density, and establishing its essentially more
uniform spatial distribution. In turn, it should lead to
change of the discharge characteristics, which can be
seen in Figs. 2, 3. This change occurs at P ~ 0.06 Torr
(see above), which corresponds to the run path
Λf ~ 25…30 cm, that is, shorter than the cathode diame-
ter. Thus, one can see that in our case the hollow cath-
ode effect is exhibited at fast electron run path Λf being
not shorter than ~ 3R of the hollow cathode.
In the present work plasma characteristics of the
discharge in low pressure oxygen with cylindrical hol-
low cathode having 38 cm diameter are determined. It is
shown that oxygen pressure increase from 0.015 to
0.09 Torr results in non-monotonous variation of radial
profile of radial electric field component in the plasma
and creation at pressure higher than Р ≈ 0.06 Torr the
potential barrier at a boundary between the negative
glow plasma and the cathode layer, which limits ion
escaping to the cathode. As well, limits of the discharge
glow characteristics are determined, which result in an
appearance of the hollow cathode effect.
ACKNOWLEDGEMENT
This work was partially supported by grant # 10-14 of
Presidium of National Academy of Sciences of Ukraine.
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Article received 01.06.2015
РАЗРЯД С ПОЛЫМ КАТОДОМ В КИСЛОРОДЕ НИЗКОГО ДАВЛЕНИЯ: ПЕРЕХОДНОЙ РЕЖИМ
В.Ю. Баженов, С.В. Мацевич, В.М. Пиун, В.В. Циолко
Установлены характеристики горения разряда с цилиндрическим полым катодом при давлениях кислорода
0,015…0,09 Торр. Найдены зависимости радиального электрического поля в плазме от параметров разряда, в частности,
установлен факт образования при давлениях больше ~ 0,06 Торр потенциального барьера на границе между плазмой
отрицательного свечения и катодным слоем, ограничивающего уход ионов на катод. Также установлены граничные ха-
рактеристики горения разряда, при которых начинает проявляться эффект полого катода.
РОЗРЯД З ПОРОЖНИСТИМ КАТОДОМ У КИСНІ НИЗЬКОГО ТИСКУ: ПЕРЕХІДНИЙ РЕЖИМ
В. Ю. Баженов, С.В. Мацевич, В.М. Піун, В.В. Ціолко
Встановлено характеристики горіння розряду з циліндричним порожнистим катодом при тисках кисню
0,015…0,09 Торр. Знайдено залежності радіального електричного поля в плазмі від параметрів розряду, зокрема, встано-
влено факт утворення при тисках більше ~ 0,06 Торр потенціального бар’єру на границі між плазмою негативного сві-
тіння та катодним шаром, який обмежує вихід іонів на катод. Також встановлено граничні характеристики горіння роз-
ряду, при яких починає проявлятися ефект порожнистого катодa.
ACKNOWLEDGEMENT
References
|
| id | nasplib_isofts_kiev_ua-123456789-112135 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-12-01T13:54:32Z |
| publishDate | 2015 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Bazhenov, V.Yu. Matsevich, S.V. Piun, V.M. Tsiolko, V.V. 2017-01-17T17:54:48Z 2017-01-17T17:54:48Z 2015 Hollow cathode discharge in low pressure oxygen: transient mode / V.Yu. Bazhenov, S.V. Matsevich, V.M. Piun, V.V. Tsiolko // Вопросы атомной науки и техники. — 2015. — № 4. — С. 177-180. — Бібліогр.: 18 назв. — англ. 1562-6016 PACS: 52.80.-s, 52.25.Ya https://nasplib.isofts.kiev.ua/handle/123456789/112135 Glow characteristics of the discharge with cylindrical hollow cathode at oxygen pressure in a range of 0.015…0.09 Torr are determined. Dependencies of radial electric field in the plasma on the discharge parameters are defined, and particular fact of creation at pressure higher than ~ 0.06 Torr the potential barrier at the boundary between negative glow plasma and cathode layer, which limits ion escaping to the cathode. As well, limits of the discharge glow characteristics are determined, which result in appearance of the hollow cathode effect. Встановлено характеристики горіння розряду з циліндричним порожнистим катодом при тисках кисню 0,015…0,09 Торр. Знайдено залежності радіального електричного поля в плазмі від параметрів розряду, зокрема, встановлено факт утворення при тисках більше ~ 0,06 Торр потенціального бар’єру на границі між плазмою негативного світіння та катодним шаром, який обмежує вихід іонів на катод. Також встановлено граничні характеристики горіння розряду, при яких починає проявлятися ефект порожнистого катодa. Установлены характеристики горения разряда с цилиндрическим полым катодом при давлениях кислорода 0,015…0,09 Торр. Найдены зависимости радиального электрического поля в плазме от параметров разряда, в частности, установлен факт образования при давлениях больше ~ 0,06 Торр потенциального барьера на границе между плазмой отрицательного свечения и катодным слоем, ограничивающего уход ионов на катод. Также установлены граничные ха-рактеристики горения разряда, при которых начинает проявляться эффект полого катода. This work was partially supported by grant # 10-14 of Presidium of National Academy of Sciences of Ukraine. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Плазменно-пучковый разряд, газовый разряд и плазмохимия Hollow cathode discharge in low pressure oxygen: transient mode Розряд з порожнистим катодом у кисні низького тиску: перехідний режим Разряд с полым катодом в кислороде низкого давления: переходной режим Article published earlier |
| spellingShingle | Hollow cathode discharge in low pressure oxygen: transient mode Bazhenov, V.Yu. Matsevich, S.V. Piun, V.M. Tsiolko, V.V. Плазменно-пучковый разряд, газовый разряд и плазмохимия |
| title | Hollow cathode discharge in low pressure oxygen: transient mode |
| title_alt | Розряд з порожнистим катодом у кисні низького тиску: перехідний режим Разряд с полым катодом в кислороде низкого давления: переходной режим |
| title_full | Hollow cathode discharge in low pressure oxygen: transient mode |
| title_fullStr | Hollow cathode discharge in low pressure oxygen: transient mode |
| title_full_unstemmed | Hollow cathode discharge in low pressure oxygen: transient mode |
| title_short | Hollow cathode discharge in low pressure oxygen: transient mode |
| title_sort | hollow cathode discharge in low pressure oxygen: transient mode |
| topic | Плазменно-пучковый разряд, газовый разряд и плазмохимия |
| topic_facet | Плазменно-пучковый разряд, газовый разряд и плазмохимия |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/112135 |
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