Influence of component content of Ar/O₂ mixture on oxygen dissociation degree in plasma of low pressure discharge with hollow cathode

• Published in: Вопросы атомной науки и техники
• Date: 2015
• Main Authors: Bazhenov, V.Yu., Lavrookevich, Yu.V., Piun, V.M., Ryabtsev, A.V., Tsiolko, V.V.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2015
• Subjects: Плазменно-пучковый разряд, газовый разряд и плазмохимия
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/112136
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Influence of component content of Ar/O₂ mixture on oxygen dissociation degree in plasma of low pressure discharge with hollow cathode / V.Yu. Bazhenov, Yu.V. Lavrookevich, V.M. Piun, A.V. Ryabtsev, V.V. Tsiolko // Вопросы атомной науки и техники. — 2015. — № 4. — С. 172-176. — Бібліогр.: 20 назв. — англ.

Influence of argon content in Ar/O₂ mixture on O₂ dissociation degree and atomic oxygen concentration in the plasma of low pressure glow discharge with hollow cathode is determined experimentally and theoretically. It is found that atomic oxygen concentration dependence on argon content in the mixtu...