Probe formation in proton beam writing facility at IAP NASU
The principles of a proton beam writing facility were described. Particular attention was paid to the problem of probe-forming system design. It was shown that using of separate systems and parts of the scanning nuclear microprobe is the most effective solution. Various probe-forming system configur...
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
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Lapin, O.S. Ponomarev, A.G. 2017-01-18T19:56:34Z 2017-01-18T19:56:34Z 2015 Probe formation in proton beam writing facility at IAP NASU / O.S. Lapin, A.G. Ponomarev // Вопросы атомной науки и техники. — 2015. — № 4. — С. 57-61. — Бібліогр.: 19 назв. — англ. 1562-6016 PACS: 41.85.P; 13 41.85.Gy; 14 41.85.Lc; 15 41.85.Si https://nasplib.isofts.kiev.ua/handle/123456789/112234 The principles of a proton beam writing facility were described. Particular attention was paid to the problem of probe-forming system design. It was shown that using of separate systems and parts of the scanning nuclear microprobe is the most effective solution. Various probe-forming system configurations for proton beam writing facility have been investigated. The optimization problem of proton beam formation was solved. On the base of this solution the probe-forming system which has best corresponded to requirements for the lithographic process has been found. Наданo опис принципів побудови каналу протонно-променевої літографії. Особливу увагу приділено завданню щодо створення зондоформуючої системи. Показано, що найбільш ефективним є рішення з використання окремих систем і пристроїв каналу ядерного скануючого мікрозонда. Розглянуто різні конфігурації зондоформуючої системи каналу протонно-променевої літографії. На підставі рішення оптимізаційної задачі з формування пучка протонів знайдена зондоформуюча система, яка найкраще відповідає вимогам для проведення літографічного процесу. Дано описание принципов построения канала протонно-лучевой литографии. Особое внимание уделено задаче по созданию зондоформирующей системы. Показано, что наиболее эффективным решением является использование отдельных систем и устройств канала ядерного сканирующего микрозонда. Рассмотрены различные конфигурации зондоформирующей системы канала протонно-лучевой литографии. На основании решения оптимизационной задачи по формированию пучка протонов найдена зондоформирующая система, которая наилучшим образом отвечает требованиям для проведения литографического процесса. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Нерелятивистская электроника Probe formation in proton beam writing facility at IAP NASU Формування пучка в каналі протонно-променевої літографії ІПФ НАНУ Формирование пучка в канале протонно-лучевой литографии ИПФ НАНУ Article published earlier |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine |
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DSpace DC |
| title |
Probe formation in proton beam writing facility at IAP NASU |
| spellingShingle |
Probe formation in proton beam writing facility at IAP NASU Lapin, O.S. Ponomarev, A.G. Нерелятивистская электроника |
| title_short |
Probe formation in proton beam writing facility at IAP NASU |
| title_full |
Probe formation in proton beam writing facility at IAP NASU |
| title_fullStr |
Probe formation in proton beam writing facility at IAP NASU |
| title_full_unstemmed |
Probe formation in proton beam writing facility at IAP NASU |
| title_sort |
probe formation in proton beam writing facility at iap nasu |
| author |
Lapin, O.S. Ponomarev, A.G. |
| author_facet |
Lapin, O.S. Ponomarev, A.G. |
| topic |
Нерелятивистская электроника |
| topic_facet |
Нерелятивистская электроника |
| publishDate |
2015 |
| language |
English |
| container_title |
Вопросы атомной науки и техники |
| publisher |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| format |
Article |
| title_alt |
Формування пучка в каналі протонно-променевої літографії ІПФ НАНУ Формирование пучка в канале протонно-лучевой литографии ИПФ НАНУ |
| description |
The principles of a proton beam writing facility were described. Particular attention was paid to the problem of probe-forming system design. It was shown that using of separate systems and parts of the scanning nuclear microprobe is the most effective solution. Various probe-forming system configurations for proton beam writing facility have been investigated. The optimization problem of proton beam formation was solved. On the base of this solution the probe-forming system which has best corresponded to requirements for the lithographic process has been found.
Наданo опис принципів побудови каналу протонно-променевої літографії. Особливу увагу приділено завданню щодо створення зондоформуючої системи. Показано, що найбільш ефективним є рішення з використання окремих систем і пристроїв каналу ядерного скануючого мікрозонда. Розглянуто різні конфігурації зондоформуючої системи каналу протонно-променевої літографії. На підставі рішення оптимізаційної задачі з формування пучка протонів знайдена зондоформуюча система, яка найкраще відповідає вимогам для проведення літографічного процесу.
Дано описание принципов построения канала протонно-лучевой литографии. Особое внимание уделено задаче по созданию зондоформирующей системы. Показано, что наиболее эффективным решением является использование отдельных систем и устройств канала ядерного сканирующего микрозонда. Рассмотрены различные конфигурации зондоформирующей системы канала протонно-лучевой литографии. На основании решения оптимизационной задачи по формированию пучка протонов найдена зондоформирующая система, которая наилучшим образом отвечает требованиям для проведения литографического процесса.
|
| issn |
1562-6016 |
| url |
https://nasplib.isofts.kiev.ua/handle/123456789/112234 |
| citation_txt |
Probe formation in proton beam writing facility at IAP NASU / O.S. Lapin, A.G. Ponomarev // Вопросы атомной науки и техники. — 2015. — № 4. — С. 57-61. — Бібліогр.: 19 назв. — англ. |
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| fulltext |
ISSN 1562-6016. ВАНТ. 2015. №4(98) 57
PROBE FORMATION IN PROTON BEAM WRITING FACILITY
AT IAP NASU
O.S. Lapin, A.G. Ponomarev
Institute of Applied Physics NASU, Sumy, Ukraine
E-mail: lapin@iap.sumy.org
The principles of a proton beam writing facility were described. Particular attention was paid to the problem of
probe-forming system design. It was shown that using of separate systems and parts of the scanning nuclear micro-
probe is the most effective solution. Various probe-forming system configurations for proton beam writing facility
have been investigated. The optimization problem of proton beam formation was solved. On the base of this solution
the probe-forming system which has best corresponded to requirements for the lithographic process has been found.
PACS: 41.85.P; 13 41.85.Gy; 14 41.85.Lc; 15 41.85.Si
INTRODUCTION
The progress in nanotechnology relates to overcom-
ing the difficulties of 3D structures fabrication with a
high aspect ratio and characteristic dimensions less than
100 nm. This causes an interest in developing of alterna-
tive techniques for high-resolution lithography. Current-
ly, the proton-beam writing (PBW) method of 3D mi-
cro- and nanostructure fabrication, based on the expo-
sure of the material surface by a focused beam of pro-
tons with an energy of a several MeV, is well devel-
oped [1, 2]. Protons with a few MeV energy in contrast
to electrons (e-beam lithography, EBL) [3] and slow
heavy ions (Focusing Ion Beam, FIB) [4] have a number
of characteristic features while moving in materials.
These features are related to the fact that the probability
of a proton interaction with atomic electrons is a few
orders of magnitude larger than its scattering by atomic
nuclei of the irradiated material. Since the effect of pro-
ton-electron interaction is small, the trajectory of pro-
tons on the first half of the path in material is close to a
straight line. The low energy of secondary electrons is a
result of the high mismatch in mass differences of the
proton and the electron that gives a low proximity ef-
fect. Therefore, the advantage of this technology is a
possibility to obtain structures with smooth and straight
walls. The fact that the penetration depth of protons for
the selected material depends on its energy enables to
create complex three-dimensional multilayer structures.
Scanning nuclear microprobe (SNMP) [5, 6] is a
hardware for proton beam writing, where a beam of
protons accelerated by electrostatic accelerator to the
energy of a few MeV is focused by the system of mag-
netic quadrupole lenses (MQL). The possibility of writ-
ing process is directly related to the characteristics of
SNMP’s probe-forming system (PFS). It should focus a
proton beam into a spot with the minimum size and
maximum current on the surface of irradiated material.
This requires of the PFS with a high demagnification
and large acceptance. In this paper, the principles to
choose a PFS for proton beam writing facility of analyt-
ical accelerator-based facility (AABF) at the Institute of
Applied Physics, National Academy of Sciences of
Ukraine (IAP NASU) are reviewed.
1. BASIC PRINCIPLES OF FOCUSING
SYSTEM CONFIGURATION
The SNMP is one of AABF’s channels at the IAP
NASU [7]. Its main applications are the study of struc-
ture and elemental composition of samples of different
origin [8, 9]. The main methods of such studies are nu-
clear-physical techniques like μ-PIXE and μ-RBS. For
these techniques, the magnitude of the beam current
I ~ 100 pA is determined by small cross-sections of the
processes of particle induced X-ray emission and
backscattered ions respectively. To obtain the desired
current the rectangular window of object collimator
must be opened to 40 µm due to the low brightness of
the beam. The size of the probe is provided at the level
of 2 μm, because PFS at the conventional SNMP has
low demagnification D = 23. To reduce the probe size
requires decreasing the size of collimator windows. On
the other hand, this reduces the beam current and leads
to an increasing in the proportion of ions scattered on
the collimators jaws. Due to the influence of aberra-
tions, such ions are focused inadequately on the sample
surface that results in deterioration of the microprobe
resolution. Therefore, parameters of the current SNMP
largely do not meet the requirements for proton beam
writing facilities for the fabrication of small structures
with typical dimensions of < 100 nm. It is necessary to
use new PFS with demagnification D > 100 that can be
implemented by using a multiplet of MQL with a fun-
damentally new focusing system configuration. A dis-
tinctive feature of this new PFS is the using of four in-
dependent power supplies of MQL. Currently PFS with
two power supplies of MQL is used in SNMP of IAP
NASU. This is necessary for stigmatic focusing of the
beam, when Gaussian planes in two transverse direc-
tions are matched with the plane of irradiated sample. In
this case, the definition of the currents of two power
supplies, which are used to supply lens coils, is reduced
to the solution of two transcendental equations
,0),(
,0),(
21
21
=
=
IIf
IIf
y
x
where I1, I2 are currents in coils of lenses from two
power supplies.
In the case of four power supplies, there are infinite-
ly set of solutions of choosing lens excitations. There-
fore, the currents of two additional power supplies are
determined by solving of the optimization problem,
where a figure of merit is the acceptance of PFS. The
acceptance is defined as a maximum quantity of the
trajectory phase volume of the beam formed by rectan-
gular object and angular collimators, which can be fo-
cused into a probe of specified size d. Optimization
ISSN 1562-6016. ВАНТ. 2015. №4(98) 58
problem in this case is a nonlinear programming prob-
lem in the form
)],([max)(
,,,,
* dd
yxyx RRrr
τ
τ
Ω=Ω ,
)),,((),( dvold ττ Θ=Ω
maxii BB ≤ ,
fx(I1,I2,I3,I4)=0, fy(I1,I2,I3,I4)=0,
},2/δ
,2/)( ,2/)(
, ,
, |)δ,,,,{(
max0
0
0
0
0
0
0
0
0
0
0
0000000
δ≤
≤≤
−
≤′≤
−−−
≤′≤
−−
<<′′=Θ
dzFdzF
a
yR
y
a
yR
a
xRx
a
xR
rx,rxyxyx
tytx
yyxx
yx
where τ = {I1, I2, I3, I4, a1,…,aN, ag, L1,eff,…, LN,eff } is a
vector of parameters that affects the beam formation in
the quadrupole PFS, N is a quantity of MQL in the sys-
tem, ai is a drift gap before lens with the number I, аg is
a working distance, Bi, Li,eff are a magnetic induction at
the pole and the effective length of the lens with the
number I;
Θ(τ,d) is a phase volume of the beam ions formed by
using of object and angular collimators;
rx,ry, Rx,Ry are dimensions of the rectangular object and
angular collimators;
Fx(zt), Fy(zt) are nonlinear transformation of phase coor-
dinates of ions from the object collimator plane into the
plane of the irradiated sample, due to the influence of
aberrations;
δmax is a maximum momentum spread of the ions in the
beam.
In works [10 - 12] it was shown that the probe-
forming systems with additional power supplies of
lenses have a set of advantages in compare to systems
with two power supplies. Such PFS have a higher ac-
ceptance and possibility to change the demagnification
in a wide range.
The most efficient solution in designing of PBW fa-
cility is to use separate elements and systems of existed
microprobe (Fig. 1, positions 1-6), while the microprobe
channel still can be used for its original objectives. This
allows to reduce costs and space occupied in the exper-
imental hall. General scheme of PBW facility at IAPis
shown in Fig. 1. Collimators of PFS uses an object (po-
sition 1) and angular (position 2) collimators of micro-
probe.
Fig. 1. Scheme of the PBW’s probe-forming system at IAP NASU: 1 – object collimator; 2 – angular collimator;
3, 4 – integrated doublet of MQL; 5 – magnetic scanning system; 6 – microprobe target chamber;
7 – vacuum valve; 8 – electrostatic scanning system; 9 – final multiplet of MQL; 10 – PBW chamber
The PBW lens system consists of the second inte-
grated doublet of MQL of SNMP (position 4) and the
final multiplet (position 9). Design feature of integrated
doublet is that the yoke and poles are made from a sin-
gle piece of soft iron (Fig. 2,a) using the electrical dis-
charge machining.
a b
c
Fig. 2. Types of MQLs that are available
for probe-forming system: integrated doublet of
MQL (a); OM50m lens (b); IAP lens (c)
The design ensures the identity of the magnetic flux-
es in all four poles of each doublet’s lens and the preci-
sion positioning of the poles to provide quadrupole
symmetry [13]. This design also allows accurate align-
ment of the doublet axes with the beam axis, which is
necessary in separated PFS to reduce lens positioning
aberrations. The outside diameter of the yoke is
235 mm, aperture radius is 6.5 mm, lens lengths are 65
and 44 mm, and the distance between the lenses is
46 mm. The maximum value of the magnetic field on
the pole is 0.45 T.
Two modernized MQLs − OM50m and IAP MQL −
are available for the final multiplet of MQL (position 9).
The pole form of IAP lens (see Fig. 2,c) is similar to
integrated doublet and differs only in increased length
[14]. The yoke of IAP lens has cylindrical shape with a
diameter of 235 mm, length is 110 mm and an aperture
radius is 6.5 mm, the maximum value of the magnetic
field on the poles is no more than 0.4 T. Two OM50
type MQLs (Oxford Microbeams Ltd [15]) (see
Fig. 2,b) have been modified. The modification was in
replacing the current-carrying coils to allow using pow-
er supplies with a maximum current of 10 A In this
case, the maximum achievable value of magnetic field
on the poles is 0.2 T, length of the lens is 60 mm, aper-
ISSN 1562-6016. ВАНТ. 2015. №4(98) 59
ture radius is 7.5 mm, and yoke outside diameter is
200 mm.
Thus, seven configurations of final multiplet have
been identified employing between 2 and 3 lenses, as
shown in Fig. 3. The notations of configurations are: C
means that lens focuses in the plane xOz and defocuses
in the plane yOz, D means that lens defocuses in the
plane xOz and focuses in the plane yOz, number indi-
cates the power supply connected to the lens. The spac-
ing between lenses of all configurations is fixed and
equal 32.5 mm.
Fig. 3. Configurations of the final multiplet of MQL.
In consideration of the integrated doublet of MQL, PBW
lens systems are: quadruplet 1 (а); quadruplet 2 (b);
quintuplet 1 (c); quintuplet 2 excitation mode (C3D4C3)
(d); quintuplet 2 excitation mode (C3C3D4) (e); quintu-
plet 3 excitation mode (C3D4D4) (f);
quintuplet 3 excitation mode (C3D4C3) (g).
Types of lenses: 1 – OM50m; 2 – IAP
2. SIMULATION
Simulation was performed for 1.5 MeV proton beam
with 5·10-5 energy spread. The system length (from ob-
ject collimator to target) was L = 661.1 cm. Object-lens
distance for all configuration was a0 = 345.3 cm. Linear
properties of the focusing system were determined using
a numerical code PROBFORM [16] based on the matri-
zant method [17]. The working distance ag was varied
by moving the final multiplet along the beam axis in the
range 4…25 cm. For each position the optimal system
parameters were obtained with the criterion of maxi-
mum acceptance. The criterion was limited by the con-
dition of the maximum current density, when the maxi-
mum possible ion current had to be focused into a spot
size d in the image plane. Optimization process was
described in [18, 19] and realized in the numerical code
MaxBEmit.
The quadruplet 1 and quintuplet 2 with the excita-
tion mode of the final multiplet (C3C3D4) (Fig. 4)
showed the best performances for 4…9 cm and
10…25 cm working distance range respectively.
Fig. 4. Acceptance: 1 – quadruplet 1; 2 – quadruplet 2;
3 – quintuplet 1; 4 – quintuplet 2 excitation mode
(C3D4C3); 5 – quintuplet 2 excitation mode (C3C3D4);
6 – quintuplet 3 excitation mode (C3D4D4);
7 – quintuplet 3 excitation mode (C3D4C3)
These two configurations are of the greatest interest.
It should be mentioned that the working distance reduc-
tion is limited by the physical parameters of the lens.
However, as seen in Fig. 5 the magnetic field required
for the second lens of the quadruplet 1 at the range of
4…18 cm working distance exceeds the value of the
saturation of magnetic field of 0.2 T for that type of
lens. At the same time, the obtained magnetic field of all
lenses of the quintuplet 2 (see Figs. 5, 6) does not ex-
ceed the maximum value.
Fig. 5. Required field on poles of lenses OM50m:
1 – lens 1 quadruplet 1; 2 – lens 2 quadruplet 1;
3 – quadruplet 2; 4 – quintuplet 1; 5 – lens 1 quintuplet
2 excitation mode (C3D4C3); 6 – lens 2 quintuplet 2
excitation mode (C3D4C3); 7 – quintuplet 2 excitation
mode (C3C3D4); 8 – quintuplet 3 excitation mode
(C3D4D4); 9 – lens 1 quintuplet 3 excitation mode
(C3D4C3); 10 – lens 2 quintuplet 3 excitation mode
(C3D4C3); 11 – maximal field on poles
ISSN 1562-6016. ВАНТ. 2015. №4(98) 60
Fig. 6. Required field on poles of lens IAP:
1 – quadruplet 2; 2 – quintuplet 1; 3 – quintuplet
2 excitation mode (C3D4C3); 4 – quintuplet 2 excitation
mode (C3C3D4); 5 – quintuplet 3 excitation mode
(C3D4D4); 6 – quintuplet 3 excitation mode (C3D4C3);
7 – maximal field on poles
These results indicate that an optimum PFS is quin-
tuplet 2 with the excitation mode of final multiplet
(C3C3D4), because such configuration in practice can
ensure maximum acceptance for small working distanc-
es. Table shows parameters of the optimum probe-
forming system.
Working distance, cm 11
Field on poles, T
B1;B2 -0.1254000;0.1648000
B3;B4 0.0567160;0.1119512
Demagnifications
Dx × Dy
102×(-127.5)
Chromatic aberrations,
µm/mrad/%
< x / x´δ > -175990.5
< y / y´δ > 21053.8
Spherical aberrations,
µm/mrad/%
< x / x´3 > 16301.5
< x / x´y´2 > 3661.2
< y / y´3 > -332.1
< y / y´x´2 > -2929.6
Acceptance, µm2mrad2 39
CONCLUSIONS
Seven configurations of PFS for proton beam writ-
ing facility was determined basing on available magnet-
ic quadrupole lenses and considering their different ex-
citation by four independent power supplies. For each
configuration, the ion-optical characteristics were calcu-
lated and the optimal parameters based on the value of
maximum acceptance were determined. Comparison of
simulation results showed that the quintuplet 2 with the
excitation mode (C3C3D4) is the optimum probe-
forming system for PBW facility, because it has the
highest achievable acceptance on entire range of the
considered working distances as well as can provide the
demagnification D > 100.
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Article received 30.04.2015
ФОРМИРОВАНИЕ ПУЧКА В КАНАЛЕ ПРОТОННО-ЛУЧЕВОЙ ЛИТОГРАФИИ ИПФ НАНУ
А.С. Лапин, А.Г. Пономарев
Дано описание принципов построения канала протонно-лучевой литографии. Особое внимание уделено
задаче по созданию зондоформирующей системы. Показано, что наиболее эффективным решением является
использование отдельных систем и устройств канала ядерного сканирующего микрозонда. Рассмотрены
различные конфигурации зондоформирующей системы канала протонно-лучевой литографии. На основании
решения оптимизационной задачи по формированию пучка протонов найдена зондоформирующая система,
которая наилучшим образом отвечает требованиям для проведения литографического процесса.
ФОРМУВАННЯ ПУЧКА В КАНАЛІ ПРОТОННО-ПРОМЕНЕВОЇ ЛІТОГРАФІЇ ІПФ НАНУ
О.С. Лапін, О.Г. Пономарьов
Наданo опис принципів побудови каналу протонно-променевої літографії. Особливу увагу приділено за-
вданню щодо створення зондоформуючої системи. Показано, що найбільш ефективним є рішення з викори-
стання окремих систем і пристроїв каналу ядерного скануючого мікрозонда. Розглянуто різні конфігурації
зондоформуючої системи каналу протонно-променевої літографії. На підставі рішення оптимізаційної задачі
з формування пучка протонів знайдена зондоформуюча система, яка найкраще відповідає вимогам для про-
ведення літографічного процесу.
INTRODUCTION
1. BASIC PRINCIPLES OF FOCUSING SYSTEM CONFIGURATION
2. SIMULATION
CONCLUSIONs
REFERENCES
ФОРМИРОВАНИЕ ПУЧКА В КАНАЛЕ ПРОТОННО-ЛУЧЕВОЙ ЛИТОГРАФИИ ИПФ НАНУ
ФОРМУВАННЯ ПУЧКА В КАНАЛІ ПРОТОННО-ПРОМЕНЕВОЇ ЛІТОГРАФІЇ ІПФ НАНУ
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