APA (7th ed.) Citation

Fedorovich, О., Hladkovskiy, V., Polozov, B., & Kruglenko, М. (2015). The bias voltage and its influence on the etching rate of silicon. Вопросы атомной науки и техники.

Chicago Style (17th ed.) Citation

Fedorovich, О.А, V.V Hladkovskiy, B.P Polozov, and М.P Kruglenko. "The Bias Voltage and Its Influence on the Etching Rate of Silicon." Вопросы атомной науки и техники 2015.

MLA (8th ed.) Citation

Fedorovich, О.А, et al. "The Bias Voltage and Its Influence on the Etching Rate of Silicon." Вопросы атомной науки и техники, 2015.

Warning: These citations may not always be 100% accurate.