Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film

• Veröffentlicht in: Проблемы прочности
• Datum: 2014
• Hauptverfasser: Her, S.C., Wu, C.L.
• Format: Artikel
• Sprache: Englisch
• Veröffentlicht: Інститут проблем міцності ім. Г.С. Писаренко НАН України 2014
• Schlagworte: Научно-технический раздел
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/112717
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film / S.C. Her, C.L. Wu // Проблемы прочности. — 2014. — № 2. — С. 66-72. — Бібліогр.: 21 назв. — англ.

Titanium nitride (TiN) films were deposited by the D.C. magnetron sputtering process on a SUS 304 steel substrate. The effect of postdeposition annealing on the microstructure and mechanical properties of thin TiN films was studied in detail using atomic force microscopy, a potentiostat and na...