Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film
Titanium nitride (TiN) films were deposited by the D.C. magnetron sputtering process on a SUS 304 steel substrate. The effect of postdeposition annealing on the microstructure and mechanical properties of thin TiN films was studied in detail using atomic force microscopy, a potentiostat and na...
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| Veröffentlicht in: | Проблемы прочности |
|---|---|
| Datum: | 2014 |
| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Інститут проблем міцності ім. Г.С. Писаренко НАН України
2014
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| Schlagworte: | |
| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/112717 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film / S.C. Her, C.L. Wu // Проблемы прочности. — 2014. — № 2. — С. 66-72. — Бібліогр.: 21 назв. — англ. |