Determination of sp³ fraction in ta-C coating using XPS and Raman spectroscopy
The paper presents results of studies on the structure of tetrahedral amorphous carbon films (ta-C) with a
 thickness in the range from 20 to 280 nm, deposited using pulsed vacuum arc technique with an electromagnetic
 Venetian blind plasma filter. The results of the phase structur...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2016 |
| Main Authors: | , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2016
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/115409 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Determination of sp³ fraction in ta-C coating using XPS and Raman spectroscopy / V. Zavaleyev, J. Walkowicz, M. Sawczak, M. Klein, D. Moszyński, R. Chodun, K. Zdunek // Вопросы атомной науки и техники. — 2016. — № 4. — С. 84-92. — Бібліогр.: 45 назв. — англ. |