Forming a unipolar pulsed discharge in nitrogen
This paper reports the current and voltage oscillograms of the pulsed discharge in the wide frequency range (from 20 to 300 kHz) with the duty cycle from 15 to 85 % for two values of the nitrogen pressure 0.1 and 1 Torr. It has been demonstrated that the current oscillograms of the pulsed glow dis...
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| Опубліковано в: : | Вопросы атомной науки и техники |
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| Дата: | 2016 |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2016
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| Цитувати: | Forming a unipolar pulsed discharge in nitrogen / V.A. Lisovskiy, P.A. Ogloblina, S.V. Dudin, V.D. Yegorenkov, A.N. Dakhov // Вопросы атомной науки и техники. — 2016. — № 6. — С. 227-230. — Бібліогр.: 23 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1859748414304026624 |
|---|---|
| author | Lisovskiy, V.A. Ogloblina, P.A. Dudin, S.V. Yegorenkov, V.D. Dakhov, A.N. |
| author_facet | Lisovskiy, V.A. Ogloblina, P.A. Dudin, S.V. Yegorenkov, V.D. Dakhov, A.N. |
| citation_txt | Forming a unipolar pulsed discharge in nitrogen / V.A. Lisovskiy, P.A. Ogloblina, S.V. Dudin, V.D. Yegorenkov, A.N. Dakhov // Вопросы атомной науки и техники. — 2016. — № 6. — С. 227-230. — Бібліогр.: 23 назв. — англ. |
| collection | DSpace DC |
| container_title | Вопросы атомной науки и техники |
| description | This paper reports the current and voltage oscillograms of the pulsed discharge in the wide frequency range
(from 20 to 300 kHz) with the duty cycle from 15 to 85 % for two values of the nitrogen pressure 0.1 and 1 Torr. It
has been demonstrated that the current oscillograms of the pulsed glow discharge possess a plasma phase and an
afterglow phase. The following stages of the plasma phase have been observed: 1. A pulse of the capacitive current
of about 0.5…1 s in duration; 2. A stage of current growth which duration has depended on gas pressure; 3.
Current decrease occurring during tens of microseconds down to the level corresponding to the constant voltage
discharge.
Были измерены осциллограммы тока и напряжения импульсного разряда в широком диапазоне частот
(от 20 до 300 кГц), коэффициентов заполнения от 15 до 85 % для двух значений давлений азота 0,1 и
1 Tорр. Было получено, что осциллограммы тока тлеющего импульсного разряда имеют плазменную фазу и
фазу послесвечения. Наблюдались следующие этапы плазменной фазы: 1. Импульс емкостного тока
длительностью примерно 0,5…1 мкс; 2. Этап роста тока, длительность которого зависела от давления газа;
3. Уменьшение тока, длившееся десятки микросекунд, до уровня, соответствующего разряду с постоянным
напряжением.
Були виміряні осцилограми струму і напруги імпульсного розряду в широкому діапазоні частот (від 20
до 300 кГц), коефіцієнтів заповнення від 15 до 85 % для двох значень тиску азоту 0,1 та 1 Toрр. Було
отримано, що осцилограми струму тліючого імпульсного розряду мають плазмову фазу і фазу післясвітіння.
Спостерігалися наступні етапи плазмової фази: 1. Імпульс ємнісного струму тривалістю приблизно
0,5…1 мкс; 2. Етап зростання струму, тривалість якого залежала від тиску газу; 3. Зменшення струму, що
тривало десятки мікросекунд, до рівня, відповідного розряду з постійною напругою.
|
| first_indexed | 2025-12-01T21:43:49Z |
| format | Article |
| fulltext |
ISSN 1562-6016. ВАНТ. 2016. №6(106)
PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY. 2016, № 6. Series: Plasma Physics (22), p. 227-230. 227
FORMING A UNIPOLAR PULSED DISCHARGE IN NITROGEN
V.A. Lisovskiy
1,2
, P.A. Ogloblina
1,3
, S.V. Dudin
1,2
, V.D. Yegorenkov
1
, A.N. Dakhov
1
1
V.N. Karazin Kharkiv National University, Kharkov, Ukraine;
2
Scientific Center of Physical Technologies, Kharkov, Ukraine;
3
Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa,
Lisboa, Portugal
E-mail: lisovskiy@yahoo.com
This paper reports the current and voltage oscillograms of the pulsed discharge in the wide frequency range
(from 20 to 300 kHz) with the duty cycle from 15 to 85 % for two values of the nitrogen pressure 0.1 and 1 Torr. It
has been demonstrated that the current oscillograms of the pulsed glow discharge possess a plasma phase and an
afterglow phase. The following stages of the plasma phase have been observed: 1. A pulse of the capacitive current
of about 0.5…1 s in duration; 2. A stage of current growth which duration has depended on gas pressure; 3.
Current decrease occurring during tens of microseconds down to the level corresponding to the constant voltage
discharge.
PACS: 52.80.Hc
INTRODUCTION
Pulsed gas discharge devices are widely applied as
light sources in lasers, plasma display panels as well as
for plasma nitriding, reactive magnetron coating etc.
[1-4]. But now the pulsed discharges of medium
frequency range are studied much less than radio
frequency [5-11] or direct current [12-18] discharges
thus hampering the progress in this domain. Therefore
the subject of this research has been to investigate the
processes participating in the formation of a unipolar
pulsed discharge of low pressure in various gases.
In her thesis Efimova [4] has reported the research
into the formation of a pulsed discharge in argon and
nitrogen in the pressure range from 2 to 7 Torr with the
duty cycle of the applied voltage from 10 to 4000 s.
She has obtained that with the voltage growing the
discharge current increases and at earlier stages of the
discharge development this current is substantially
higher than one observed when the dc voltage is
applied. It has been revealed that the current signal is
not constant during the pulse and the duty cycle
duration is an important parameter.
The authors of paper [2] have performed a numerical
study of the processes taking place during
the breakdown in the dc pulsed discharge at low
nitrogen pressure in the "plane-tip" design. They have
demonstrated that the formation of the pulsed discharge
undergoes 3 consequent stages. First, the gap is slowly
filled with the ions produced near the anode, then during
the second stage the ionization front is propagating from
the anode to the cathode. At the same time the cathode
sheath is being formed and secondary phenomena
become to participate leading to the third stage, i.e. to
the glow discharge formation.
The present paper deals with the studies of the
formation stages of the pulsed discharge between flat
electrodes in nitrogen in a wide range of frequencies
and duty cycles.
Cathode Anode
Gas supply
Pumping
Oscilloscope
Discharge
tube
Fig. 1. Block-scheme of the experimental device
1. EXPERIMENTAL
Experiments in the present paper have been
performed with the help of the device with the block-
scheme depicted in Figure 1. Flat anode and cathode of
stainless steel have been located in the discharge tube
56 mm of inner diameter with the inter-electrode
distance of 20 mm. The cathode has been fed with a
pulsed unipolar negative voltage from the generator in
the frequency range of 20…300 kHz, duty cycle from
0.15 to 0.85 and the applied voltage values up to
1000 V. The anode potential was zero. The voltage
between the electrodes and the current have been
registered with the oscilloscope PCS500 (Velleman
Instruments) with its signals fed to a computer. The
range of the discharge current values registered did not
exceed 100 mA. All experiments have been performed
for two values of the nitrogen pressure, namely, 0.1 and
1 Torr. Gas pressure has been measured with the
capacitive manometer-baratron with the maximum
measured pressure value of 10 Torr.
228 ISSN 1562-6016. ВАНТ. 2016. №6(106)
2. EXPERIMENTAL RESULTS
The oscilloscope pictures measured clearly
demonstrate two different phases: a plasma phase (when
the negative voltage is fed to the electrode) and an
afterglow phase (no voltage across the electrodes, the
plasma is decaying).
Fig. 2 presents the current oscilloscope pictures for
the pressure of 0.1 Torr, the duty cycle of 0.50 and the
frequencies from 20 to 230 kHz. The pulsed voltage
with the constant amplitude of 700 V was applied across
the electrodes. It is clear from Fig. 2 that after an abrupt
growth of the capacitive current in the plasma phase the
discharge current first achieves the level of about
-20 mA, and then it decreases uniformly. It approaches
the value -4.8 mA marked by a horizontal line, i.e. the
value of the discharge current at the constant (not
pulsed) voltage but has no time to achieve it because the
plasma time period is finished. For the discharge with
the conditions presented in Fig. 2 the current approaches
on the average the value of -10 mA.
Let us consider the stages of plasma formation in
more detail. Fig. 2 also presents the oscilloscope
pictures of the current pulses during the first 3 s. One
may define 3 stages of the discharge development in the
plasma phase:
I. A capacitive current pulse,
II. Discharge current growth,
III. Slow decrease of the discharge current.
The first stage is identical for all gas pressure values,
this is the capacitive current pulse approaching–
(10…30) mA. The duration of this stage is constant
amounting about 0.5 s, and it is associated with the
time of voltage growth at the cathode to its maximum
value. At the second stage there occurs the current
growth under the discharge formation. At the pressure
given the duration of the second stage amounts to about
0.2 s. At the third stage of the plasma phase formation
we observe the decrease of the discharge current in time
with moderate oscillations, and the current is
approaching the saturation at the level of -10 mA.
However the duration of the discharge plasma phase at
the low nitrogen pressure happens to be insufficient to
approach the level corresponding to the glow discharge
current.
It is clear in Fig. 2 that the current oscilloscope
pictures for the frequencies above 50 kHz almost match,
i.e. the discharge experiences almost identical stages of
formation and development at different frequencies.
Let us further consider the pulsed discharge in N2
with the same parameters (the duty cycle of 0.5, the
frequency range from 20 to 300 kHz) but at higher
pressure of 1 Torr. One clearly observes on the
0 10 20 30 40 50
-30
-20
-10
0
10
20
30
145
100
I,
m
A
Time, s
20 kHz230
50
DC
0 1 2 3
-30
-20
-10
0
145
100
50
230 kHz
III
I,
m
A
Time, s
DC
I II
20 kHz
Fig. 2. Discharge current oscilloscope pictures and
the stages of plasma formation (I, II and III) for the
pulsed voltage of 700 V, the duty cycle of 0.5 and the
nitrogen pressure of 0.1 Torr
0 10 20 30 40 50
-60
-40
-20
0
20 200
300
100
50
I,
m
A
Time, s
20 kHz
DC
0 1 2 3 4 5
-60
-40
-20
0
20
50 kHz
100 kHz
200 kHz
20 kHz
I,
m
A
Time, s
300 kHz
DC
Fig. 3. Discharge current oscilloscope pictures for the
pulsed voltage of 400 V, the duty cycle of 0.5 and the
pressure of 1 Torr in N2
ISSN 1562-6016. ВАНТ. 2016. №6(106) 229
oscilloscope pictures for this case shown in Fig. 3 that
similar to the pressure value of 0.1 Torr the capacitive
current jumps are present under the transition between
the plasma phase and the afterglow one. For high
frequency pulses the capacitive current at the start of the
plasma phase is less than that for the low frequency
ones. This is associated with the properties of the
generator of pulses because for high frequencies the
front of the voltage pulse is not so steep as for low
frequencies. Consequently, the derivative of the voltage
over time is less and so respectively is the capacitive
current.
The voltage at the cathode possesses several time
periods with the different growth rate. During the first
time period the growth rate of the voltage is maximum,
the current also grows fast. The second time period is
characterized by a slower growth of the voltage and the
current, and at the end of this time period the current
approaches maximum. During the third time period the
voltage slowly saturates, and the current decreases.
Such a behavior of the current indicates that this current
is not purely capacitive but it is a sum of the capacitive
current and the current of the discharge under
formation.
Perhaps the charged particles remained after the first
plasma phase play a considerable role at the initial time
of the discharge formation. During the afterglow phase
they fill the cathode and anode sheaths due to ambipolar
diffusion, these sheaths possessing very low
concentrations of electrons and ions in the burning
discharge. At the beginning of a regular voltage pulse
the ions and electrons escape to the cathode and anode,
respectively, thus leading to the increase of the
discharge current at the first and second stages. One
may assume that after the second stage is completed the
charged particles which arrived to the electrodes under
afterglow are lost at their surfaces, and the forming
cathode and anode sheaths are depleted of charged
particles what leads to a decrease of the discharge
current during the third stage.
Note that during the voltage saturation the discharge
current ceases to decrease and starts to grow. The
discharge current maximum is achieved in about 10–
15 s depending on the frequency of the pulses. Similar
current behavior has also been observed at low nitrogen
pressure of 0.1 Torr, however, the period of current
growth amounted then to 0.2 s that was approximately
50 times higher than at the gas pressure of 1 Torr. In the
paper by Efimova [4] for the argon pressure of 4.5 Torr
the current oscilloscope picture for the 500 V voltage
also possesses a section with the discharge current
growth with a duration of about 75…80 s. Therefore
one can draw a conclusion that increasing gas pressure
involves the growth of the period duration associated
with the growing discharge current.
The general formula for the coefficient Da of the
ambipolar diffusion in the plasma consisting of positive
ions and electrons is written in the form [19, 20]:
e e
a e
e e
D D
D D D
, (1)
where D+, De, +, e are the diffusion coefficients (D)
and mobilities () of ions and electrons, respectively.
For nitrogen papers [21–23] report the values
D+ = 39.7 cm
2
Torr/s, De = 910
5
cm
2
Torr/s,
+ = 1.5410
3
cm
2
Torr/(V s),
e = 4.210
5
cm
2
Torr/(V s). At the pressure of 1 Torr
we have Da = 3340 cm
2
/s. The rate of the charged
particle loss due to the escape to the tube walls and
electrodes is equal to
2 ad D where is the
diffusion length which for the tube of radius R with the
inter-electrode distance L may be found according to the
formula
22
2
405.21
LR
. (2)
As the experiments in this paper have been performed in
the tube of 2.8 cm in radius and the inter-electrode gap
was 2 cm then
2
22
2
19.4
28.2
405.21
cm . (3)
The rate of diffusion loss of charged particles will be
14
2
1038.119.43340
s
Da
d , (4)
whereas the period of plasma decay at the pressure of
1 Torr amounts to d = 7.210
-5
s = 72 s, and at the
pressure of 0.1 Torr it will be ten times less, d = 7.2 s.
It is clear from Fig. 2 that at the nitrogen pressure of 0.1
Torr and the frequency of 20 kHz the plasma has time to
decay during the afterglow phase (of 25 s in duration)
and at the frequency of 100 kHz the afterglow phase has
a duration of 5 s what might lead to a substantial
decrease in the charged particle concentration in the
plasma volume up to the moment a regular voltage
pulse arrives.
CONCLUSIONS
This paper has undertaken the study of the unipolar
pulsed discharge in nitrogen for two values of pressure,
0.1 and 1 Torr. The current and voltage oscilloscope
pictures have been registered in the frequency range
from 20 to 300 kHz and of the duty cycle from 0.15 to
0.85. The pulsed discharge has been observed to transit
through a plasma phase and an afterglow phase. The
plasma phase has been separated into three stages: 1. A
pulse of capacitive current of duration amounting to
about 0.5…1 s; 2. A stage of current growth with the
duration depending on the nitrogen pressure; 3. Current
decrease during tens of microseconds to the level
corresponding to the discharge with the constant
voltage. A conclusion has been drawn that charged
particles being remained after the preceding plasma
phase may play an important role at the initial period of
the discharge formation. Ions and electrons fill in the
cathode and anode sheaths during the afterglow phase
due to the ambipolar diffusion, and at the start of a
regular voltage pulse they escape to the electrodes
leading to the increase of the discharge current at the
first and second stages. Then the cathode and anode
sheaths under formation are depleted of the charged
particles what is the cause of the discharge current to
decrease during the third stage.
, (1)
230 ISSN 1562-6016. ВАНТ. 2016. №6(106)
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Article received 22.10.2016
ФОРМИРОВАНИЕ ОДНОПОЛЯРНОГО ИМПУЛЬСНОГО РАЗРЯДА В АЗОТЕ
В.А. Лисовский, П.А. Оглоблина, С.В. Дудин, В.Д. Егоренков, А.Н. Дахов
Были измерены осциллограммы тока и напряжения импульсного разряда в широком диапазоне частот
(от 20 до 300 кГц), коэффициентов заполнения от 15 до 85 % для двух значений давлений азота 0,1 и
1 Tорр. Было получено, что осциллограммы тока тлеющего импульсного разряда имеют плазменную фазу и
фазу послесвечения. Наблюдались следующие этапы плазменной фазы: 1. Импульс емкостного тока
длительностью примерно 0,5…1 мкс; 2. Этап роста тока, длительность которого зависела от давления газа;
3. Уменьшение тока, длившееся десятки микросекунд, до уровня, соответствующего разряду с постоянным
напряжением.
ФОРМУВАННЯ ОДНОПОЛЯРНОГО ІМПУЛЬСНОГО РОЗРЯДУ В АЗОТІ
В.О. Лісовський, П.О. Оглобліна, С.В. Дудін, В.Д. Єгоренков, О.М. Дахов
Були виміряні осцилограми струму і напруги імпульсного розряду в широкому діапазоні частот (від 20
до 300 кГц), коефіцієнтів заповнення від 15 до 85 % для двох значень тиску азоту 0,1 та 1 Toрр. Було
отримано, що осцилограми струму тліючого імпульсного розряду мають плазмову фазу і фазу післясвітіння.
Спостерігалися наступні етапи плазмової фази: 1. Імпульс ємнісного струму тривалістю приблизно
0,5…1 мкс; 2. Етап зростання струму, тривалість якого залежала від тиску газу; 3. Зменшення струму, що
тривало десятки мікросекунд, до рівня, відповідного розряду з постійною напругою.
|
| id | nasplib_isofts_kiev_ua-123456789-115437 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-12-01T21:43:49Z |
| publishDate | 2016 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Lisovskiy, V.A. Ogloblina, P.A. Dudin, S.V. Yegorenkov, V.D. Dakhov, A.N. 2017-04-04T19:59:34Z 2017-04-04T19:59:34Z 2016 Forming a unipolar pulsed discharge in nitrogen / V.A. Lisovskiy, P.A. Ogloblina, S.V. Dudin, V.D. Yegorenkov, A.N. Dakhov // Вопросы атомной науки и техники. — 2016. — № 6. — С. 227-230. — Бібліогр.: 23 назв. — англ. 1562-6016 PACS: 52.80.Hc https://nasplib.isofts.kiev.ua/handle/123456789/115437 This paper reports the current and voltage oscillograms of the pulsed discharge in the wide frequency range (from 20 to 300 kHz) with the duty cycle from 15 to 85 % for two values of the nitrogen pressure 0.1 and 1 Torr. It has been demonstrated that the current oscillograms of the pulsed glow discharge possess a plasma phase and an afterglow phase. The following stages of the plasma phase have been observed: 1. A pulse of the capacitive current of about 0.5…1 s in duration; 2. A stage of current growth which duration has depended on gas pressure; 3. Current decrease occurring during tens of microseconds down to the level corresponding to the constant voltage discharge. Были измерены осциллограммы тока и напряжения импульсного разряда в широком диапазоне частот (от 20 до 300 кГц), коэффициентов заполнения от 15 до 85 % для двух значений давлений азота 0,1 и 1 Tорр. Было получено, что осциллограммы тока тлеющего импульсного разряда имеют плазменную фазу и фазу послесвечения. Наблюдались следующие этапы плазменной фазы: 1. Импульс емкостного тока длительностью примерно 0,5…1 мкс; 2. Этап роста тока, длительность которого зависела от давления газа; 3. Уменьшение тока, длившееся десятки микросекунд, до уровня, соответствующего разряду с постоянным напряжением. Були виміряні осцилограми струму і напруги імпульсного розряду в широкому діапазоні частот (від 20 до 300 кГц), коефіцієнтів заповнення від 15 до 85 % для двох значень тиску азоту 0,1 та 1 Toрр. Було отримано, що осцилограми струму тліючого імпульсного розряду мають плазмову фазу і фазу післясвітіння. Спостерігалися наступні етапи плазмової фази: 1. Імпульс ємнісного струму тривалістю приблизно 0,5…1 мкс; 2. Етап зростання струму, тривалість якого залежала від тиску газу; 3. Зменшення струму, що тривало десятки мікросекунд, до рівня, відповідного розряду з постійною напругою. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Low temperature plasma and plasma technologies Forming a unipolar pulsed discharge in nitrogen Формирование однополярного импульсного разряда в азоте Формування однополярного імпульсного розряду в азоті Article published earlier |
| spellingShingle | Forming a unipolar pulsed discharge in nitrogen Lisovskiy, V.A. Ogloblina, P.A. Dudin, S.V. Yegorenkov, V.D. Dakhov, A.N. Low temperature plasma and plasma technologies |
| title | Forming a unipolar pulsed discharge in nitrogen |
| title_alt | Формирование однополярного импульсного разряда в азоте Формування однополярного імпульсного розряду в азоті |
| title_full | Forming a unipolar pulsed discharge in nitrogen |
| title_fullStr | Forming a unipolar pulsed discharge in nitrogen |
| title_full_unstemmed | Forming a unipolar pulsed discharge in nitrogen |
| title_short | Forming a unipolar pulsed discharge in nitrogen |
| title_sort | forming a unipolar pulsed discharge in nitrogen |
| topic | Low temperature plasma and plasma technologies |
| topic_facet | Low temperature plasma and plasma technologies |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/115437 |
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