Macroparticles in beam-plasma systems
The macroparticle (MP) contamination is the most important technological problem of vacuum arc deposition of coatings. The results of theoretical study of MP charging and dynamics in the near-substrate sheath are presented. The charge and dynamics of MP are governed by local parameters of ion and...
Saved in:
| Published in: | Вопросы атомной науки и техники |
|---|---|
| Date: | 2016 |
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2016
|
| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/115448 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Macroparticles in beam-plasma systems / A.A. Bizyukov, I.О. Girka, E.V. Romashchenko, O.D. Chibisov // Вопросы атомной науки и техники. — 2016. — № 6. — С. 187-190. — Бібліогр.: 24 назв. — англ. |